Patents by Inventor Hua-Hsuan Chen

Hua-Hsuan Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORMED USING THE METHOD AND REACTOR SYSTEM FOR PERFORMING THE METHOD
    Publication number: 20230250531
    Abstract: Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.
    Type: Application
    Filed: April 5, 2023
    Publication date: August 10, 2023
    Inventors: Tomohiro Kubota, Mitsuya Utsuno, Toshihisa Nozawa, Seiji Samukawa, Hua Hsuan Chen
  • Method of forming structures using a neutral beam
    Patent number: 11643724
    Abstract: Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.
    Type: Grant
    Filed: July 15, 2020
    Date of Patent: May 9, 2023
    Assignee: ASM IP Holding B.V.
    Inventors: Tomohiro Kubota, Mitsuya Utsuno, Toshihisa Nozawa, Seiji Samukawa, Hua Hsuan Chen
  • METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORMED USING THE METHOD AND REACTOR SYSTEM FOR PERFORMING THE METHOD
    Publication number: 20210017648
    Abstract: Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.
    Type: Application
    Filed: July 15, 2020
    Publication date: January 21, 2021
    Inventors: Tomohiro Kubota, Mitsuya Utsuno, Toshihisa Nozawa, Seiji Samukawa, Hua Hsuan Chen
  • Methods and apparatus for measuring magnetic field homogeneity
    Patent number: 7443164
    Abstract: In one embodiment, the present invention includes a method for obtaining magnetic resonance (MR) data of a phantom located in a magnetic resonance imaging (MRI) system with multiple bandwidths. The data may then be processed to determine magnetic field homogeneity of the MRI system.
    Type: Grant
    Filed: November 7, 2006
    Date of Patent: October 28, 2008
    Assignee: Board of Regents, The University of Texas System
    Inventors: Geoffrey D. Clarke, Hua-Hsuan Chen, John W. Roby, III, Rex D. Boykin
  • Methods and apparatus for measuring magnetic field homogeneity
    Publication number: 20070164739
    Abstract: In one embodiment, the present invention includes a method for obtaining magnetic resonance (MR) data of a phantom located in a magnetic resonance imaging (MRI) system with multiple bandwidths. The data may then be processed to determine magnetic field homogeneity of the MRI system.
    Type: Application
    Filed: November 7, 2006
    Publication date: July 19, 2007
    Inventors: Geoffrey Clarke, Hua-Hsuan Chen, John Roby, Rex Boykin