Patents by Inventor Hua-Wei Yu

Hua-Wei Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070221616
    Abstract: The invention is directed to a method for etching a color filter. The method comprises steps of providing a substrate having a multilayered filter material layer formed thereon and then disposing the substrate into an etching chamber with introducing a gas mixture into the etching chamber for performing a dry etching process so as to pattern the multilayered filter material layer, wherein the gas mixture comprises a physical reactive gas and a chemical reactive gas.
    Type: Application
    Filed: March 24, 2006
    Publication date: September 27, 2007
    Inventors: Yi-Tyng Wu, Hua-Wei Yu