Patents by Inventor HuaJuan HE

HuaJuan HE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11099090
    Abstract: A double-membrane capacitive pressure sensor comprising a glass substrate, wherein a shallow groove is formed in the center of the glass substrate; a shallow groove through-hole is formed in the center of the shallow groove, and the shallow groove through-hole extends from the bottom surface of the shallow groove to the bottom surface of the glass substrate; a capacitor C1 capable of measuring the low-pressure difference and a capacitor C2 capable of measuring the high-pressure difference are arranged above the shallow groove; the capacitor C1 capable of measuring the low-pressure difference comprises a bottom electrode plate and a thin pressure sensitive membrane, and the capacitor C2 capable of measuring the high-pressure difference comprises a thick pressure sensitive membrane and a top electrode plate.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: August 24, 2021
    Inventors: Ming Qing, ZhenJun Wang, KeWen Long, HuaJuan He
  • Publication number: 20200319049
    Abstract: A double-membrane capacitive pressure sensor comprising a glass substrate, wherein a shallow groove is formed in the center of the glass substrate; a shallow groove through-hole is formed in the center of the shallow groove, and the shallow groove through-hole extends from the bottom surface of the shallow groove to the bottom surface of the glass substrate; a capacitor C1 capable of measuring the low-pressure difference and a capacitor C2 capable of measuring the high-pressure difference are arranged above the shallow groove; the capacitor C1 capable of measuring the low-pressure difference comprises a bottom electrode plate and a thin pressure sensitive membrane, and the capacitor C2 capable of measuring the high-pressure difference comprises a thick pressure sensitive membrane and a top electrode plate;
    Type: Application
    Filed: June 22, 2018
    Publication date: October 8, 2020
    Inventors: Ming QING, ZhenJun WANG, KeWen LONG, HuaJuan HE