Abstract: Provided are FinFET devices and methods of forming the same. A dummy gate having gate spacers on opposing sidewalls thereof is formed over a substrate. A dielectric layer is formed around the dummy gate. An upper portion of the dummy gate is removed and upper portions of the gate spacers are removed, so as to form a first opening in the dielectric layer. A lower portion of the dummy gate is removed to form a second opening below the first opening. A metal layer is formed in the first and second openings. The metal layer is partially removed to form a metal gate.

Abstract: A method of fabricating a device includes forming a dummy gate over a plurality of fins. Thereafter, a first portion of the dummy gate is removed to form a first trench that exposes a first hybrid fin and a first part of a second hybrid fin. The method further includes filling the first trench with a dielectric material disposed over the first hybrid fin and over the first part of the second hybrid fin. Thereafter, a second portion of the dummy gate is removed to form a second trench and the second trench is filled with a metal layer. The method further includes etching-back the metal layer, where a first plane defined by a first top surface of the metal layer is disposed beneath a second plane defined by a second top surface of a second part of the second hybrid fin after the etching-back the metal layer.

Abstract: Examples of an integrated circuit with FinFET devices and a method for forming the integrated circuit are provided herein. In some examples, an integrated circuit device includes a substrate, a fin extending from the substrate, a gate disposed on a first side of the fin, and a gate spacer disposed alongside the gate. The gate spacer has a first portion extending along the gate that has a first width and a second portion extending above the first gate that has a second width that is greater than the first width. In some such examples, the second portion of the gate spacer includes a gate spacer layer disposed on the gate.

Abstract: A pellicle for an extreme ultraviolet (EUV) photomask includes a pellicle frame and a main membrane attached to the pellicle frame. The main membrane includes a plurality of nanotubes, and each of the plurality of nanotubes is covered by a coating layer containing Si and one or more metal elements.

Abstract: A method of forming a semiconductor transistor device. The method comprises forming a channel structure over a substrate and forming a first source/drain structure and a second source/drain structure on opposite sides of the fin structure. The method further comprises forming a gate structure surrounding the fin structure. The method further comprises flipping and partially removing the substrate to form a back-side capping trench while leaving a lower portion of the substrate along upper sidewalls of the first source/drain structure and the second source/drain structure as a protective spacer. The method further comprises forming a back-side dielectric cap in the back-side capping trench.

Abstract: A method for manufacturing a semiconductor device includes forming a first dielectric layer over a semiconductor fin. The method includes forming a second dielectric layer over the first dielectric layer. The method includes exposing a portion of the first dielectric layer. The method includes oxidizing a surface of the second dielectric layer while limiting oxidation on the exposed portion of the first dielectric layer.

Abstract: Methods for detecting the presence of nanoparticles or microparticles by cell mass spectrometry (CMS) are provided. CMS methods are provided for determining the number of nanoparticles or microparticles in each cell. Nanoparticles whose intracellular concentration can be determines by the CMS methods of the invention include polymeric nanoparticles (NPs), liposomes, viral-based NPs, carbon nanotubes, diamond NPs, polymeric micelles, nanocarriers, liposomes, and viral nanoparticles. Determination of the efficiency of drug delivery and intracellular titer of pathogens according to the invention is disclosed. Methods for determining intracellular uptake of virus particles are provided.

Abstract: Apparatus and methods for performing mass spectrometry of a nanoparticle or virus analyte. Apparatus may include a laser desorption plate, a mass analyzer configured to measure mass over the range of m/z from 105 to 1010, an electrical shield surrounding the mass analyzer, and a charge sensitive detector, wherein the laser firing is phase lock synchronized with the applied radiofrequency voltages.

Abstract: A novel system and method for charge-monitoring mass spectrometry is provided. The mass spectrometer can be used to measure the mass of one or more analytes having masses in the range of about a few Daltons to more than about 1015 Daltons. The invention can be used for rapid mass distribution measurements. For example, the system and method can be used to distinguish cancer cells from normal cells when their mass distributions are different.

Abstract: Apparatus and methods for performing mass spectrometry of a nanoparticle or virus analyte. Apparatus may include a laser desorption plate, a mass analyzer configured to measure mass over the range of m/z from 105 to 1010, an electrical shield surrounding the mass analyzer, and a charge sensitive detector, wherein the laser firing is phase lock synchronized with the applied radiofrequency voltages.

Abstract: Methods for detecting the presence of nanoparticles or microparticles by cell mass spectrometry (CMS) are provided. CMS methods are provided for determining the number of nanoparticles or microparticles in each cell. Nanoparticles whose intracellular concentration can be determines by the CMS methods of the invention include polymeric nanoparticles (NPs), liposomes, viral-based NPs, carbon nanotubes, diamond NPs, polymeric micelles, nanocarriers, liposomes, and viral nanoparticles. Determination of the efficiency of drug delivery and intracellular titer of pathogens according to the invention is disclosed. Methods for determining intracellular uptake of virus particles are provided.

Abstract: A novel system and method for charge-monitoring mass spectrometry is provided. The mass spectrometer can be used to measure the mass of one or more analytes having masses in the range of about a few Daltons to more than about 1015 Daltons. The invention can be used for rapid mass distribution measurements. For example, the system and method can be used to distinguish cancer cells from normal cells when their mass distributions are different.

Abstract: The optical recording medium protection cassette of the present invention comprises a housing, a clasping member and at least one switch member. A first opening for retaining an optical recording medium is formed on a first lateral side of the housing and a groove is formed on the inside of a second lateral side which is perpendicular to the first lateral side. The clasping member is in engagement with the first opening of the housing to restrict the optical recording medium to be located within the housing. The clasping member is provided with at least a first buckling portion and at least a V-shaped portion having a first side and a second side. Each switch member has a first end as a second buckling portion fastened to the first buckling portion of the clasping member, which makes the switch member rotate relative to the first buckling portion, and a second end which is a positioning portion substantially stops at either the first side or the second side of the V-shaped portion.

Abstract: A disk magazine for accessing Compact Disks includes a bottom stage, a vertical shaft fixed and supported at the bottom stage, a prop-up piece being loaded with Compact Disks and having an opening through which the vertical shaft extends, a barrel tightly combined with the bottom stage at the lower end, and a lid tightly covering up the upper side of the bottom stage. The lid is provided with a fixing hole into which the tapering tip pole of the vertical shaft inserts, and two O-rings are used for sealing between the lid and barrel, as well as between the bottom stage and barrel respectively to prevent the disk magazine from the environmental contamination.

Abstract: A transportation mechanism of magnetic handling for accessing Compact Disks. The transportation mechanism includes a reciprocating device having a base, an electromagnetic head provided on the base, a control unit controlling the reciprocating device such that the base is reciprocated between different processing positions, and a magnetic spacer. The Compact Disk, sandwiched by the electromagnetic head and the magnetic spacer as the magnetic spacer is attracted by the electromagnetic head, is further transported by the transportation mechanism whereby the damage due to bad suction for CDs is minimized. Comparing with the conventional suction means by vacuum, the transportation mechanism of the invention is also advantaged for the simple structure, easy maintenance, and low cost, thereby raising the production yield.