Abstract: Embodiments relate to a control method, apparatus, system, device and medium for production equipment. The method includes: receiving a recipe upload instruction, and generating a first control instruction in response to the recipe upload instruction to control the production equipment to upload first recipe data; receiving the first recipe data, and parsing the first recipe data to generate a corresponding first recipe file in a preset format; generating a second control instruction during parsing the first recipe data to control the production equipment to upload second recipe data; and receiving the second recipe data, and parsing the second recipe data to generate a corresponding second recipe file in a preset format.

Abstract: The present application discloses a method of handling a transaction request, including: performing an information exchange between a manufacturing execution system and a machine control system by an agent module; the information exchange including: sending a first transaction request by the machine control system to the agent module, and then sending the first transaction request by the agent module to the manufacturing execution system.

Abstract: Embodiments relate to a control method, apparatus, system, device and medium for production equipment. The method includes: receiving a recipe upload instruction, and generating a first control instruction in response to the recipe upload instruction to control the production equipment to upload first recipe data; receiving the first recipe data, and parsing the first recipe data to generate a corresponding first recipe file in a preset format; generating a second control instruction during parsing the first recipe data to control the production equipment to upload second recipe data; and receiving the second recipe data, and parsing the second recipe data to generate a corresponding second recipe file in a preset format.

Abstract: A system for detecting a semiconductor process and a method for detecting a semiconductor process are provided. The system for detecting a semiconductor process includes a memory for storing computer-executable instructions and a processor for executing the computer-executable instructions to implement functions of a first acquisition module and a matching module. The first acquisition module is configured to acquire a preset process recipe including preset process recipe parameters, and is further configured to initiate a matching request to the matching module and send the preset process recipe to the matching module. The matching module is configured to acquire, based on the matching request, a production process recipe including a production process recipe flow and production process recipe parameters, and is further configured to determine whether the production process recipe flow is correct and determine whether the production process recipe parameters meet the preset process recipe parameters.

Abstract: The present application discloses a method of handling a transaction request, including: performing an information exchange between a manufacturing execution system and a machine control system by an agent module; the information exchange including: sending a first transaction request by the machine control system to the agent module, and then sending the first transaction request by the agent module to the manufacturing execution system.

Abstract: A fault monitoring system and method for a semiconductor manufacturing process are involved. The method for monitoring the fault includes: acquiring a handling completion record and a goods arrival at Equipment (EQP) record from a Manufacturing Execution System (MES); determining whether the handling completion record corresponds to the goods arrival at EQP record by comparing the acquired handling completion record and goods arrival at EQP record; and when the handling completion record does not correspond to the goods arrival at EQP record, generating exception reporting information and sent the exception reporting information to a monitoring platform. No operation after goods arrival at EQP can be monitored automatically.