Abstract: A method for implementing an overhead rail guided transport system includes the following steps: a vehicle transport system is provided, which includes an upper rail guided transport system, a lower rail guided transport system, a vehicle exchange equipment, and a plurality of vehicles operating in the upper and lower rail guided transport system; respective vehicle utilizing rates in the upper and lower rail guided transport systems are provided; the vehicle exchange equipment is used to interchange the vehicles respectively operating in the upper and lower rail guided transport systems in order to equilibrate the respective vehicle utilizing rates.

Abstract: A multi-track handling and storage apparatus includes at least two main tracks, at least two cranes and an intelligent integrated logic system. The main tracks are arranged separately, and every two adjacent main tracks are connected by at least one switching track. Bottoms of the cranes are slidably disposed on the main tracks. The intelligent integrated logic system includes a command receiving unit, a database unit, an analyzing unit, a crane dispatching unit and a route selection unit which are integrated with each other. The above-mentioned main tracks, switching tracks and cranes are controlled by the units of the intelligent integrated logic system. The present invention further provides a multi-track handling and storage method.

Abstract: A method for implementing an overhead rail guided transport system includes the following steps: a vehicle transport system is provided, which includes an upper rail guided transport system, a lower rail guided transport system, a vehicle exchange equipment, and a plurality of vehicles operating in the upper and lower rail guided transport system; respective vehicle utilizing rates in the upper and lower rail guided transport systems are provided; the vehicle exchange equipment is used to interchange the vehicles respectively operating in the upper and lower rail guided transport systems in order to equilibrate the respective vehicle utilizing rates.

Abstract: A rotary transport system has a main track with transport(s) or shuttle(s) moving along the main track and an auxiliary storage unit. The auxiliary storage unit has a plurality of storing positions, and the storing positions are rotating around the main track. Therefore, the object, such as a FOUP (Front Opening Unified Pod) can be loaded on or unloaded from the storing positions.

Abstract: An automatic wafer storage system and a method of controlling the system are disclosed. The automatic wafer storage system includes an analysis module and a storage unit. The analysis module estimates the locations between an idle equipment, a transport tool, and the storage unit, so as to control the storage unit and the transport tool to move to the best location for the transport tool to receive wafers from the storage unit. After that, the transport tool carries the wafers to the idle equipment for processing.

Abstract: A multi-track handling and storage apparatus includes at least two main tracks, at least two cranes and an intelligent integrated logic system. The main tracks are arranged separately, and every two adjacent main tracks are connected by at least one switching track. Bottoms of the cranes are slidably disposed on the main tracks. The intelligent integrated logic system includes a command receiving unit, a database unit, an analyzing unit, a crane dispatching unit and a route selection unit which are integrated with each other. The above-mentioned main tracks, switching tracks and cranes are controlled by the units of the intelligent integrated logic system. The present invention further provides a multi-track handling and storage method.

Abstract: An automatic wafer storage system and a method of controlling the system are disclosed. The automatic wafer storage system includes an analysis module and a storage unit. The analysis module estimates the locations between an idle equipment, a transport tool, and the storage unit, so as to control the storage unit and the transport tool to move to the best location for the transport tool to receive wafers from the storage unit. After that, the transport tool carries the wafers to the idle equipment for processing.