Patents by Inventor Huan-Chi Ma
Huan-Chi Ma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12156408Abstract: A semiconductor device includes a sense amplifier, a first magnetic tunneling junction (MTJ) connected to the sense amplifier at a first distance, a second MTJ connected to the sense amplifier at a second distance, and a third MTJ connected to the sense amplifier at a third distance. Preferably, the first distance is less than the second distance, the second distance is less than the third distance, a critical dimension of the first MTJ is less than a critical dimension of the second MTJ, and the critical dimension of the second MTJ is less than a critical dimension of the third MTJ.Type: GrantFiled: November 21, 2023Date of Patent: November 26, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Po-Wei Wang, Yi-An Shih, Huan-Chi Ma
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Publication number: 20240243185Abstract: Provided is a semiconductor device including an enhancement mode (E-mode) high electron mobility transistor (HEMT). The E-mode HEMT includes a substrate, and a channel layer disposed on the substrate. A barrier structure disposed on the channel layer. A pair of source/drain (S/D) metals respectively disposed on the channel layer at opposite sides of the barrier structure. A gate metal disposed on the barrier structure between the pair of S/D metals. The channel layer has a two-dimensional electron gas (2DEG) layer close to an interface between the channel layer and the barrier structure. A fluorine ion concentration in the channel layer adjacent to the 2DEG layer is greater than that away from the 2DEG layer.Type: ApplicationFiled: February 17, 2023Publication date: July 18, 2024Applicant: United Microelectronics Corp.Inventors: Huan Chi Ma, Kuan-Ting Lin, Ying Jie Huang, Chien-Wen Yu
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Publication number: 20240090233Abstract: A semiconductor device includes a sense amplifier, a first magnetic tunneling junction (MTJ) connected to the sense amplifier at a first distance, a second MTJ connected to the sense amplifier at a second distance, and a third MTJ connected to the sense amplifier at a third distance. Preferably, the first distance is less than the second distance, the second distance is less than the third distance, a critical dimension of the first MTJ is less than a critical dimension of the second MTJ, and the critical dimension of the second MTJ is less than a critical dimension of the third MTJ.Type: ApplicationFiled: November 21, 2023Publication date: March 14, 2024Applicant: UNITED MICROELECTRONICS CORP.Inventors: Po-Wei Wang, Yi-An Shih, Huan-Chi Ma
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Patent number: 11916126Abstract: A semiconductor device includes a substrate and a gate structure. The gate structure is disposed on the substrate, and the gate structure includes a titanium nitride barrier layer a titanium aluminide layer, and a middle layer. The titanium aluminide layer is disposed on the titanium nitride barrier layer, and the middle layer is disposed between the titanium aluminide layer and the titanium nitride barrier layer. The middle layer is directly connected with the titanium aluminide layer and the titanium nitride barrier layer, and the middle layer includes titanium and nitrogen. A concentration of nitrogen in the middle layer is gradually decreased in a vertical direction towards an interface between the middle layer and the titanium aluminide layer.Type: GrantFiled: November 18, 2022Date of Patent: February 27, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Hsin Hsu, Huan-Chi Ma, Chien-Wen Yu, Shih-Min Chou, Nien-Ting Ho, Ti-Bin Chen
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Patent number: 11871585Abstract: A semiconductor device includes a sense amplifier, a first magnetic tunneling junction (MTJ) connected to the sense amplifier at a first distance, a second MTJ connected to the sense amplifier at a second distance, and a third MTJ connected to the sense amplifier at a third distance. Preferably, the first distance is less than the second distance, the second distance is less than the third distance, a critical dimension of the first MTJ is less than a critical dimension of the second MTJ, and the critical dimension of the second MTJ is less than a critical dimension of the third MTJ.Type: GrantFiled: July 29, 2021Date of Patent: January 9, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Po-Wei Wang, Yi-An Shih, Huan-Chi Ma
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Patent number: 11664425Abstract: A method for fabricating p-type field effect transistor (FET) includes the steps of first providing a substrate, forming a pad layer on the substrate, forming a well in the substrate, performing an ion implantation process to implant germanium ions into the substrate to form a channel region, and then conducting an anneal process to divide the channel region into a top portion and a bottom portion. After removing the pad layer, a gate structure is formed on the substrate and a lightly doped drain (LDD) is formed adjacent to two sides of the gate structure.Type: GrantFiled: January 20, 2022Date of Patent: May 30, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shi-You Liu, Tsai-Yu Wen, Ching-I Li, Ya-Yin Hsiao, Chih-Chiang Wu, Yu-Chun Liu, Ti-Bin Chen, Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu
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Publication number: 20230078993Abstract: A semiconductor device includes a substrate and a gate structure. The gate structure is disposed on the substrate, and the gate structure includes a titanium nitride barrier layer a titanium aluminide layer, and a middle layer. The titanium aluminide layer is disposed on the titanium nitride barrier layer, and the middle layer is disposed between the titanium aluminide layer and the titanium nitride barrier layer. The middle layer is directly connected with the titanium aluminide layer and the titanium nitride barrier layer, and the middle layer includes titanium and nitrogen. A concentration of nitrogen in the middle layer is gradually decreased in a vertical direction towards an interface between the middle layer and the titanium aluminide layer.Type: ApplicationFiled: November 18, 2022Publication date: March 16, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Hui-Hsin Hsu, Huan-Chi Ma, Chien-Wen Yu, Shih-Min Chou, Nien-Ting Ho, Ti-Bin Chen
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Publication number: 20230048684Abstract: A MOS capacitor includes a substrate having a capacitor forming region thereon, an ion well having a first conductivity type in the substrate, a counter doping region having a second conductivity type in the ion well within the capacitor forming region, a capacitor dielectric layer on the ion well within the capacitor forming region, a gate electrode on the capacitor dielectric layer, a source doping region having the second conductivity type on a first side of the gate electrode within the capacitor forming region, and a drain doping region having the second conductivity type on a second side of the gate electrode within the capacitor forming region.Type: ApplicationFiled: October 31, 2022Publication date: February 16, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Jian-Li Lin, Wei-Da Lin, Cheng-Guo Chen, Ta-Kang Lo, Yi-Chuan Chen, Huan-Chi Ma, Chien-Wen Yu, Kuan-Ting Lu, Kuo-Yu Liao
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Publication number: 20230005988Abstract: A semiconductor device includes a sense amplifier, a first magnetic tunneling junction (MTJ) connected to the sense amplifier at a first distance, a second MTJ connected to the sense amplifier at a second distance, and a third MTJ connected to the sense amplifier at a third distance. Preferably, the first distance is less than the second distance, the second distance is less than the third distance, a critical dimension of the first MTJ is less than a critical dimension of the second MTJ, and the critical dimension of the second MTJ is less than a critical dimension of the third MTJ.Type: ApplicationFiled: July 29, 2021Publication date: January 5, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Po-Wei Wang, Yi-An Shih, Huan-Chi Ma
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Patent number: 11538917Abstract: A semiconductor device includes a substrate and a gate structure. The gate structure is disposed on the substrate, and the gate structure includes a titanium nitride barrier layer and a titanium aluminide layer. The titanium aluminide layer is disposed on the titanium nitride barrier layer, and a thickness of the titanium aluminide layer ranges from twice a thickness of the titanium nitride barrier layer to three times the thickness of the titanium nitride barrier layer.Type: GrantFiled: June 22, 2021Date of Patent: December 27, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Hsin Hsu, Huan-Chi Ma, Chien-Wen Yu, Shih-Min Chou, Nien-Ting Ho, Ti-Bin Chen
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Publication number: 20220384603Abstract: A semiconductor device includes a substrate and a gate structure. The gate structure is disposed on the substrate, and the gate structure includes a titanium nitride barrier layer and a titanium aluminide layer. The titanium aluminide layer is disposed on the titanium nitride barrier layer, and a thickness of the titanium aluminide layer ranges from twice a thickness of the titanium nitride barrier layer to three times the thickness of the titanium nitride barrier layer.Type: ApplicationFiled: June 22, 2021Publication date: December 1, 2022Applicant: UNITED MICROELECTRONICS CORP.Inventors: Hui-Hsin Hsu, Huan-Chi Ma, Chien-Wen Yu, Shih-Min Chou, Nien-Ting Ho, Ti-Bin Chen
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Publication number: 20220181505Abstract: A MOS capacitor includes a substrate having a capacitor forming region thereon, an ion well having a first conductivity type in the substrate, a counter doping region having a second conductivity type in the ion well within the capacitor forming region, a capacitor dielectric layer on the ion well within the capacitor forming region, a gate electrode on the capacitor dielectric layer, a source doping region having the second conductivity type on a first side of the gate electrode within the capacitor forming region, and a drain doping region having the second conductivity type on a second side of the gate electrode within the capacitor forming region.Type: ApplicationFiled: January 11, 2021Publication date: June 9, 2022Inventors: Jian-Li Lin, Wei-Da Lin, Cheng-Guo Chen, Ta-Kang Lo, Yi-Chuan Chen, Huan-Chi Ma, Chien-Wen Yu, Kuan-Ting Lu, Kuo-Yu Liao
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Publication number: 20220140080Abstract: A method for fabricating p-type field effect transistor (FET) includes the steps of first providing a substrate, forming a pad layer on the substrate, forming a well in the substrate, performing an ion implantation process to implant germanium ions into the substrate to form a channel region, and then conducting an anneal process to divide the channel region into a top portion and a bottom portion. After removing the pad layer, a gate structure is formed on the substrate and a lightly doped drain (LDD) is formed adjacent to two sides of the gate structure.Type: ApplicationFiled: January 20, 2022Publication date: May 5, 2022Applicant: UNITED MICROELECTRONICS CORP.Inventors: Shi-You Liu, Tsai-Yu Wen, Ching-I Li, Ya-Yin Hsiao, Chih-Chiang Wu, Yu-Chun Liu, Ti-Bin Chen, Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu
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Patent number: 11271078Abstract: A p-type field effect transistor (pFET) includes a gate structure on a substrate, a channel region in the substrate directly under the gate structure, and a source/drain region adjacent to two sides of the gate structure. Preferably, the channel region includes a top portion and a bottom portion, in which a concentration of germanium in the bottom portion is lower than a concentration of germanium in the top portion and a depth of the top portion is equal to a depth of the bottom portion.Type: GrantFiled: April 1, 2020Date of Patent: March 8, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shi-You Liu, Tsai-Yu Wen, Ching-I Li, Ya-Yin Hsiao, Chih-Chiang Wu, Yu-Chun Liu, Ti-Bin Chen, Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu
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Publication number: 20200235208Abstract: A p-type field effect transistor (pFET) includes a gate structure on a substrate, a channel region in the substrate directly under the gate structure, and a source/drain region adjacent to two sides of the gate structure. Preferably, the channel region includes a top portion and a bottom portion, in which a concentration of germanium in the bottom portion is lower than a concentration of germanium in the top portion and a depth of the top portion is equal to a depth of the bottom portion.Type: ApplicationFiled: April 1, 2020Publication date: July 23, 2020Inventors: Shi-You Liu, Tsai-Yu Wen, Ching-I Li, Ya-Yin Hsiao, Chih-Chiang Wu, Yu-Chun Liu, Ti-Bin Chen, Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu
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Patent number: 10651275Abstract: A method for fabricating p-type field effect transistor (FET) includes the steps of first providing a substrate, forming a pad layer on the substrate, forming a well in the substrate, performing an ion implantation process to implant germanium ions into the substrate to form a channel region, and then conducting an anneal process to divide the channel region into a top portion and a bottom portion. After removing the pad layer, a gate structure is formed on the substrate and a lightly doped drain (LDD) is formed adjacent to two sides of the gate structure.Type: GrantFiled: February 11, 2018Date of Patent: May 12, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shi-You Liu, Tsai-Yu Wen, Ching-I Li, Ya-Yin Hsiao, Chih-Chiang Wu, Yu-Chun Liu, Ti-Bin Chen, Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu
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Patent number: 10388788Abstract: A method for forming a semiconductor device is disclosed. A p-type field-effect transistor (p-FET) is formed on a semiconductor substrate. A dielectric layer is formed on the semiconductor substrate and completely covers the p-FET. At least an opening is formed in the dielectric layer and exposes a source/drain region of the p-FET. A conductive material is then formed filling the opening, wherein the conductive material comprises a first stress; specifically, a tensile stress between 400 and 800 MPa.Type: GrantFiled: June 28, 2017Date of Patent: August 20, 2019Assignee: UNITED MICROELECTRONICS CORP.Inventors: Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu, Kuo-Chin Hung
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Publication number: 20190214465Abstract: A method for fabricating p-type field effect transistor (FET) includes the steps of first providing a substrate, forming a pad layer on the substrate, forming a well in the substrate, performing an ion implantation process to implant germanium ions into the substrate to form a channel region, and then conducting an anneal process to divide the channel region into a top portion and a bottom portion. After removing the pad layer, a gate structure is formed on the substrate and a lightly doped drain (LDD) is formed adjacent to two sides of the gate structure.Type: ApplicationFiled: February 11, 2018Publication date: July 11, 2019Inventors: Shi-You Liu, Tsai-Yu Wen, Ching-I Li, Ya-Yin Hsiao, Chih-Chiang Wu, Yu-Chun Liu, Ti-Bin Chen, Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu
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Publication number: 20180342618Abstract: A method for forming a semiconductor device is disclosed. A p-type field-effect transistor (p-FET) is formed on a semiconductor substrate. A dielectric layer is formed on the semiconductor substrate and completely covers the p-FET. At least an opening is formed in the dielectric layer and exposes a source/drain region of the p-FET.Type: ApplicationFiled: June 28, 2017Publication date: November 29, 2018Inventors: Shao-Ping Chen, Huan-Chi Ma, Chien-Wen Yu, Kuo-Chin Hung