Abstract: A simulation method of CMP process comprises: building a CMP model, and forming a matrix table of line width logarithm-density according to the CMP model, and making each intersection of the matrix table correspond to each CMP result under the corresponding line width and density; dividing a layout into a plurality of grids, and converting the equivalent line width and density of each grid into the coordinate of line width logarithm-density in the matrix table; fitting and calculating preliminary CMP simulation results of each grid according to the coordinate of each grid in the matrix table and the CMP simulation results of its adjacent intersections of the matrix table; fitting and computing final CMP simulation results of each grid according to a related weighting factor which considers the impact of adjacent grids for the current grid on the layout; outputting the final CMP simulation results of the whole layout.

Abstract: The invention disclosed a simulation method of CMP process, comprising: firstly, building a CMP model, and forming a matrix table of line width logarithm-density according to the CMP model, and making each intersection of the matrix table correspond to each CMP result under the corresponding line width and density; secondly, dividing a layout into a plurality of grids, and converting the equivalent line width and density of each grid into the coordinate of line width logarithm-density in the matrix table; thirdly, fitting and calculating preliminary CMP simulation results of each grid according to the coordinate of each grid in the matrix table and the CMP simulation results of its adjacent intersections of the matrix table; then, fitting and computing final CMP simulation results of each grid according to a related weighting factor which considers the impact of adjacent grids for the current grid on the layout; finally, outputting the final CMP simulation results of the whole layout.