Patents by Inventor Huang Chien Kai

Huang Chien Kai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Overlay mark assistant feature
    Patent number: 9214347
    Abstract: A method and apparatus for alignment are disclosed. An exemplary apparatus includes a substrate having an alignment region; an alignment feature in the alignment region of the substrate; and a dummy feature disposed within the alignment feature. A dimension of the dummy feature is less than a resolution of an alignment mark detector.
    Type: Grant
    Filed: August 16, 2013
    Date of Patent: December 15, 2015
    Assignee: Taiwan semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Chieh Yao, Hsien-Cheng Wang, Huang Chien Kai, Chun-Kuang Chen
  • OVERLAY MARK ASSISTANT FEATURE
    Publication number: 20130330904
    Abstract: A method and apparatus for alignment are disclosed. An exemplary apparatus includes a substrate having an alignment region; an alignment feature in the alignment region of the substrate; and a dummy feature disposed within the alignment feature. A dimension of the dummy feature is less than a resolution of an alignment mark detector.
    Type: Application
    Filed: August 16, 2013
    Publication date: December 12, 2013
    Inventors: Hsin-Chieh Yao, Hsien-Cheng Wang, Huang Chien Kai, Chun-Kuang Chen