Abstract: Substrate containers include a deformable surface configured to deflect into an internal space so as to reduce the volume of said internal space when the reticle pod is opened. The deformable surface can be a filter, for example a filter supported by a deformable member, a filter including a deformable member, a filter that is retained under tension in the substrate container, or a filter disposed on a deformable member.

Abstract: A substrate container is provided including an inner pod configured to accommodate a large format reticle, and an outer pod configured to contain and secure the inner pod. The inner pod can be clamped together using a clip or features provided on the outer pod. Features of the outer pod that can clamp the inner pod include flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. Clamping mechanisms can be actuated by physical, electrical, and/or magnetic features, such as placement of a door in an opening of a shell, operation of a door latch, or interaction of a tool to release the clamping mechanism using mechanical, electrical, and/or magnetic force.

Abstract: Reticle contacts for use in a reticle container are provided having further features for wear reduction. The wear reduction features include one or more of a ring-shaped projection or one or more elongate arcing projections from a reticle contact region, one or more reliefs such as ring-shaped trenches provided in a reticle contact region, or one or more reliefs provided by having relatively thinner regions of the reticle contact region.

Abstract: A titanium-based composite catalyst for polyester synthesis, preparation method and application thereof are provided. The preparation method is: preparing a titanium-silicon catalyst precursor first, adding the titanium-silicon catalyst precursor to a biochar material in a certain mass ratio and mixing evenly, and aging, drying, calcining and wet grinding to obtain a titanium-silicon composite catalyst, and then mixing the titanium-silicon composite catalyst and a phosphate ester with a mass ratio of 1:(0.001-0.5) to obtain the titanium-based composite catalyst. The titanium-based composite catalyst is composed of the phosphate ester and the titanium-silicon composite catalyst, wherein the phosphate ester is adsorbed and wrapped on the surface of the titanium-silicon composite catalyst; the phosphate ester is combined with a titanium-silicon catalyst in the titanium-silicon composite catalyst by van der Waals force.

Abstract: A method for preparing a cationic dyeable flame-retardant high-strength polyester fiber is provided, after mixing oligomer A, oligomer B, and ethylene terephthalate and carrying out a polycondensation reaction to obtain a cationic dyeable flame-retardant polyester masterbatch, adding the cationic dyeable flame-retardant polyester masterbatch to the polyester chips according to a certain ratio for melt spinning, to prepare the cationic dyeable flame-retardant high-strength polyester fiber; oligomer A is prepared by the esterification reaction of a phosphorus flame retardant and a diol; oligomer B is prepared by the esterification reaction of sodium isophthalate sulfonate and a diol; the ratio of the sum of the molar weight of oligomer A and oligomer B to the molar weight of ethylene terephthalate is 3:7-6:4.

Abstract: Described are baseplate devices used to support, transport, and process a reticle, including to support a reticle during a step of detecting particle contamination at a surface of the reticle prior to using the reticle in an extreme ultraviolet (EUV) lithography process.

Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.

Abstract: A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.

Abstract: Spacers include a base configured to be placed within depressions of one of a cover or a baseplate of a reticle pod, and a contact surface configured to contact the other of the cover and the baseplate. The spacers are configured to space the cover and the baseplate apart from one another such that sealing surfaces of the cover and the baseplate are separated by a gap. The depressions can be gripper pockets of the baseplate. Multiple spacers can be used in a reticle pod to provide the gap between sealing surfaces. The spacers can be installed to prepare a reticle pod for shipment.

Abstract: Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.

Abstract: A frame for constructing nerve tract is provided, including microcatheters, a support, and a shell. The shell is configured to contain a culture medium inside. The microcatheters are configured to culture nerve cells. The multiple microcatheters are suspended and fixed into the shell by the support, the microcatheters are arranged along a direction from one end to the other end of the shell, catheter walls of the microcatheters are provided with through holes, the nerve cells in the microcatheter cannot flow out through the through holes, and the culture medium enters the microcatheter through the through holes. A method for constructing nerve tract based on the frame described is provided, including: filling the nerve cells wrapped with a collagen hydrogel stock solution into the microcatheters, and after the collagen hydrogel stock solution is completely cross-linked, placing the frame loaded with the nerve cells in a culture device for perfusion culture.

Abstract: An apparatus includes a reticle pod. The reticle pod includes a baseplate having a first surface, a cover having a second surface, and at least one layer. The first surface includes a first mating surface. The second surface includes a second mating surface. The at least one layer is bonded to one or more of at least a part of the first mating surface and at least a part of the second mating surface. The first surface and the second surface overlap at the first mating surface and the second mating surface when the cover is attached to the baseplate.

Abstract: This technical disclosure describes a device that includes a recital pod and the method of making and maintaining the pod. The device includes a pod that includes a cover including a cover body; a baseplate including a baseplate body; and one or more mating surfaces formed on one or both of the baseplate body and the cover body to assemble between the cover and the baseplate to each other. The one or more mating surfaces each includes an outermost coating configured to be wear-resistant and lubricating, the outermost coating includes a composite metal plating, and the composite metal plating includes a metal plating with a lubricant embedded therein and/or layered over the metal plating.

Abstract: A pod includes a cover with a cover body, a baseplate with a baseplate body, and one or more seal surfaces. The one or more seal surfaces are formed on one or more of the baseplate body and the cover body to provide sealing. A method of producing a reticle pod includes forming one or more seal surfaces on at least one of a baseplate body of a baseplate and a cover body of a cover. The one or more seal surfaces are formed to provide sealing between the baseplate and the cover. Each of the one or more seal surfaces includes a wear-resistant outermost coating with a Rockwell C hardness of about or greater than 70.

Abstract: Sensor zones are created on an inner pod of a reticle container using a dry coating method. The sensor zones are discrete zones having a specific spectral reflectivity. The sensor zones are positioned such that they can be read by a tool to determine distance of portions of the pod. The use of discrete zones and a dry coating method for applying those discrete zones overcomes issues with inconsistency and difficulty in cleaning or maintaining reflectance of an inner pod of the reticle container in comparison with inner pods plated entirely with material or other wet coating applied materials.

Abstract: A preparation method of a miniature intelligent calcium alginate hydrogel end operator based on different microelectrodes is introduced. The method includes an electrodeposition step of depositing a deposition solution under the action of a non-uniform magnetic field to form an anode surface; a processing step of transferring obtained hydrogel microstructures to a calcium chloride solution, making the hydrogel microstructure self-wind sufficiently; and a pickup step of collecting a self-winding single-layer film alginate microstructure in a culture dish, and placing it in specific environment for preservation. The preparation method can provide a degradable and convenient micro-operator, which could be locally prepared into different function components.

Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.

Abstract: A container for supporting a workpiece, the workpiece including a chamfer around upper and lower edges of the workpiece is disclosed. The container includes a door and a shell capable of coupling with the door to define an isolated environment within the container. The container includes a workpiece support mounted to the door. The workpiece support includes a support post. The support post is configured to support a workpiece at a corner of the workpiece. The support post includes a first sloping wall. A second sloping wall is at a bottom of the first sloping wall. The second sloping side wall is configured to support a workpiece. The first sloping wall and the second sloping wall are oriented with different non-zero slopes.

Abstract: The application provides a power control method and apparatus. The power control method includes: obtaining, by a transmit end of a link, bit error rate information of a receive end of the link; and if the bit error rate information does not meet a predetermined condition, adjusting a transmit power class value of the transmit end. According to the power control method and apparatus of the application, the transmit power class value of the transmit end of the link can be dynamically adjusted according to a change of a system or an external environment, thereby improving interference immunity of the link and ensuring stability and reliability of data transmission.