Patents by Inventor Hubert Altendorfer
Hubert Altendorfer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8204296Abstract: Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer are provided. One computer-implemented method for generating a standard reference die for use in a die to standard reference die inspection includes acquiring output of an inspection system for a centrally located die on a wafer and one or more dies located on the wafer. The method also includes combining the output for the centrally located die and the one or more dies based on within die positions of the output. In addition, the method includes generating the standard reference die based on results of the combining step.Type: GrantFiled: September 14, 2010Date of Patent: June 19, 2012Assignee: KLA-Tencor Corp.Inventors: Kris Bhaskar, Mark McCord, Santosh Bhattacharyya, Ardis Liang, Richard Wallingford, Hubert Altendorfer, Kais Maayah
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Publication number: 20100329540Abstract: Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer are provided. One computer-implemented method for generating a standard reference die for use in a die to standard reference die inspection includes acquiring output of an inspection system for a centrally located die on a wafer and one or more dies located on the wafer. The method also includes combining the output for the centrally located die and the one or more dies based on within die positions of the output. In addition, the method includes generating the standard reference die based on results of the combining step.Type: ApplicationFiled: September 14, 2010Publication date: December 30, 2010Applicant: KLA-TENCOR CORPORATIONInventors: Kris Bhaskar, Mark McCord, Santosh Bhattacharyya, Ardis Liang, Richard Wallingford, Hubert Altendorfer, Kais Maayah
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Patent number: 7796804Abstract: Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer are provided. One computer-implemented method for generating a standard reference die for use in a die to standard reference die inspection includes acquiring output of an inspection system for a centrally located die on a wafer and one or more dies located on the wafer. The method also includes combining the output for the centrally located die and the one or more dies based on within die positions of the output. In addition, the method includes generating the standard reference die based on results of the combining step.Type: GrantFiled: July 18, 2008Date of Patent: September 14, 2010Assignee: KLA-Tencor Corp.Inventors: Kris Bhaskar, Mark McCord, Santosh Bhattacharyya, Ardis Liang, Richard Wallingford, Hubert Altendorfer, Kais Maayah
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Publication number: 20090041332Abstract: Methods for generating a standard reference die for use in a die to standard reference die inspection and methods for inspecting a wafer are provided. One computer-implemented method for generating a standard reference die for use in a die to standard reference die inspection includes acquiring output of an inspection system for a centrally located die on a wafer and one or more dies located on the wafer. The method also includes combining the output for the centrally located die and the one or more dies based on within die positions of the output. In addition, the method includes generating the standard reference die based on results of the combining step.Type: ApplicationFiled: July 18, 2008Publication date: February 12, 2009Applicant: KLA-TENCOR CORPORATIONInventors: Kris Bhaskar, Mark McCord, Santosh Bhattacharyya, Ardis Liang, Richard Wallingford, Hubert Altendorfer, Kais Maayah
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Patent number: 7477371Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.Type: GrantFiled: August 15, 2006Date of Patent: January 13, 2009Assignee: KLA-Tencor CorporationInventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
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Publication number: 20070103676Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.Type: ApplicationFiled: August 15, 2006Publication date: May 10, 2007Applicant: KLA-Tencor CorporationInventors: Norbert Marxer, Kenneth Gross, Hubert Altendorfer, George Kren
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Patent number: 7102744Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.Type: GrantFiled: July 10, 2003Date of Patent: September 5, 2006Assignee: KLA-Tencor CorporationInventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
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Publication number: 20040080741Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.Type: ApplicationFiled: July 10, 2003Publication date: April 29, 2004Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
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Patent number: 6606153Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.Type: GrantFiled: July 10, 2001Date of Patent: August 12, 2003Assignee: Kla-Tencor CorporationInventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
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Publication number: 20020051130Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.Type: ApplicationFiled: July 10, 2001Publication date: May 2, 2002Inventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren
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Patent number: 6271916Abstract: A light beam is directed towards a surface along a direction normal to the surface. The surface is caused to move so that the beam scans the surface along a spiral path. An ellipsoidal mirror is placed with its axis along the surface normal to collect light scattered by the surface and any anomalies at the surface at collection angles away from the surface normal. In some applications, a lens arrangement with its axis along the surface normal is also used to collect the light scattered by the surface and any anomalies. The light scattered by the mirror and lenses may be directed to the same or different detectors. Preferably light scattered by the surface within a first range of collection angles from the axis is detected by a first detector and light scattered by the surface within a second range of collection angles from the axis is detected by a second detector.Type: GrantFiled: December 20, 1996Date of Patent: August 7, 2001Assignee: Kla-Tencor CorporationInventors: Norbert Marxer, Kenneth P. Gross, Hubert Altendorfer, George Kren