Abstract: A substrate processing apparatus includes a base with a process-side surface and a substrate support arranged on the process-side surface and designed to carry a substrate at its periphery. The periphery, more specifically the plane defined by the periphery, is spaced apart from the process-side surface. The substrate processing apparatus also includes a radiation sensor adapted to measure electromagnetic radiation arranged on a side of a back-side surface of the base. A radiation channel is arranged between the radiation sensor and the periphery of the substrate support, more specifically between the radiation sensor and the plane defined by the periphery, wherein the radiation channel is at least partially permeable to electromagnetic radiation.

Abstract: A substrate processing apparatus includes a base with a process-side surface and a substrate support arranged on the process-side surface and designed to carry a substrate at its periphery. The periphery, more specifically the plane defined by the periphery, is spaced apart from the process-side surface. The substrate processing apparatus also includes a radiation sensor adapted to measure electromagnetic radiation arranged on a side of a back-side surface of the base. A radiation channel is arranged between the radiation sensor and the periphery of the substrate support, more specifically between the radiation sensor and the plane defined by the periphery, wherein the radiation channel is at least partially permeable to electromagnetic radiation.

Abstract: An adjustable steering column includes a steering spindle (1), a shell unit (3) bearing the steering spindle (1), a console unit (4), stationary on the chassis, with at least one side wall (5), which extends bilaterally along the shell unit (3) and supports the shell unit (3). The steering column also includes a securement device, which can be opened and closed, in the opened state of which the shell unit (3) is adjustable relative to the console unit (4) at least in one adjustment direction, and which has a tension bolt (11) penetrating openings in the shell unit (3) and in the at least one side wall (5).

Abstract: A locking device of a steering column adjustable in at least one adjustment direction (46) comprises at least one locking part (20, 21) associated with the adjustment direction (46) or one of the adjustment directions, at least one counterlocking part (14, 15) associated with this adjustment direction (46) and an openable and closable tensioning arrangement, in the opened state of which first and second toothings (38, 39) of locking parts (20, 21) are spaced apart from first and second countertoothings (40, 41) of the counterlocking part (14, 15), and in the closed state of which the locking part (20, 21) and the counterlocking part (14, 15) engage each other's teeth.

Abstract: A locking device of a steering column adjustable in at least one adjustment direction (46) comprises at least one locking part (20, 21) associated with the adjustment direction (46) or one of the adjustment directions, at least one counterlocking part (14, 15) associated with this adjustment direction (46) and an openable and closable tensioning arrangement, in the opened state of which first and second toothings (38, 39) of locking parts (20, 21) are spaced apart from first and second countertoothings (40, 41) of the counterlocking part (14, 15), and in the closed state of which the locking part (20, 21) and the counterlocking part (14, 15) engage each other's teeth.

Abstract: An adjustable steering column comprises a steering spindle (1), a shell unit (3) bearing the steering spindle (1), a console unit (4), stationary on the chassis, with at least one side wall (5), which extends bilaterally along the shell unit (3) and supports the shell unit (3), and a securement device, which can be opened and closed, in the opened state of which the shell unit (3) is adjustable relative to the console unit (4) at least in one adjustment direction, and which has a tension bolt (11) penetrating openings in the shell unit (3) and in the at least one side wall (5).

Abstract: A steering shaft for a steering system of a motor vehicle including an outer tubular member, and an inner tubular member extending into the outer member and secured therein against axial and/or radial displacement relative to the outer member, with the two tubular members being axially displaceable relative to each other in case of a collision, and with one of the tubular members having tear-off strips with bent-over front ends having bent-over sections engaging the other tubular member, each of the tear-off strips being formed by two spaced flutes of the one tubular member, the flutes also defining weakness locations.