Abstract: A method of creating an undercut sidewall profile within an opening formed in a positive resist layer disposed upon a transparent substrate includes the step of forming a positive resist layer on the upper surface of the substrate, and optically patterning the resist layer by selectively directing light at the resist layer from above the upper surface of the substrate. The lower surface of the substrate is flooded with light to partially expose the lowermost region of the resist layer, and the exposed resist is dissolved to form patterned openings therein. The resulting sidewalls of the patterned resist openings have an enlarged width adjacent the upper surface of the substrate. The sidewalls of the resist layer are then flooded with light from above the substrate, the upper region of the resist layer is cured by an electron beam, and the resist layer is developed a second time to dissolve exposed portions of the resist sidewalls, thereby forming an undercut resist sidewall profile.

Abstract: 44A pressure transducer which uses the principle of a variation in the resonance frequency of a membrane when it is subjected to a variable pressure. The transducer comprises a vibrating membrane which is fixed on a support member forming a cavity, and a cover member forming a second cavity. Excitation of the membrane is facilitated since it is made of a piezoelectric material and is provided with electrodes. An object of the invention is to provide a digital output pressure transducer which can be minaturized and which has low power consumption.

Abstract: A piezoelectric resonator, particularly for electronic wrist watches, comprises an elongated piezoelectric crystal rod that oscillates in length-extension. Opposite faces of the rod are partially metallized; and short wires are secured tangentially to these metallized surfaces midway of the length of the rod. The wires extend perpendicular to the length of the rod and are secured at their other ends to metallized opposite surfaces of an elongated ceramic support which is parallel to and of about the same size and shape as the rod. The support also has metallized end faces which are secured to the inner ends of support wires that pass through a casing in sealed relationship and mount the support and rod in spaced relation from the casing.