Abstract: The invention involves the introduction of a gas-flow restrictor and reservoir upstream of a mass flow controller (MFC) in a gas-panel stick. The restrictor and reservoir components function to smooth out pressure spikes in the gas line, thus preventing gas-flow irregularities that can occur in an MFC or pressure-insensitive MFC. The restrictor and reservoir components can be integrated into the MFC.

Abstract: The present invention provides a processing apparatus having multiple systems, and multiple components in each system. The apparatus includes a monitoring capability for monitoring the components and calculating a Health Index of each system, based on aggregate component performances of the components. The computer may initiate a trouble-shooting routine on components of a system if the Health Index of the system is below a preselected threshold value relative to a signature Health Index of the system. Also disclosed is a method for monitoring the performance characteristics of components in a multi-component chemical-delivery system.