Patents by Inventor Hubertus Jacobus Maria Van Beijsterveldt

Hubertus Jacobus Maria Van Beijsterveldt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate holder and device manufacturing method
    Patent number: 6822730
    Abstract: A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
    Type: Grant
    Filed: July 9, 2003
    Date of Patent: November 23, 2004
    Assignee: ASML Netherlands B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Arthur Winfried Eduardus Minnaert, Maurice Anton Jaques Teuwen, Joeri Lof
  • Substrate holder and device manufacturing method
    Publication number: 20040052031
    Abstract: A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
    Type: Application
    Filed: July 9, 2003
    Publication date: March 18, 2004
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Arthur Winfried Eduardus Minnaert, Maurice Anton Jaques Teuwen, Joeri Lof