Patents by Inventor Hubertus Johannes Julius Stohr

Hubertus Johannes Julius Stohr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vertical furnace for the treatment of semiconductor substrates
    Patent number: 6225602
    Abstract: The treatment chamber in the furnace is delimited by a liner of refractory material. In order to increase the life thereof and in particular to restrict the sensitivity to deposits deposited by the process gas fed through the furnace, it is proposed to make the liner of a silicon carbide material. To seal the furnace chamber, a second liner of quartz material is placed around a liner of this type and the gap between the two liners is flushed.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: May 1, 2001
    Assignee: Advanced Semiconductor Materials International N.V.
    Inventors: Jacobus Pieter Buijze, Jeroen Jan Stoutjesdijk, Christianus Gerardus Maria De Ridder, Hubertus Johannes Julius Stohr