Patents by Inventor Hubertus Renier Maria VAN LIEROP

Hubertus Renier Maria VAN LIEROP has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vibration isolation system and lithographic apparatus
    Patent number: 11249403
    Abstract: A vibration isolation system including a support, a forward actuator and a return device. The support is for supporting the body on a base. The support has a body engaging surface and a base engaging surface. The base engaging surface is arranged to couple to the base. The support couples the body engaging surface to the body in a coupled state. The support uncouples the body engaging surface from the body in an uncoupled state. The forward actuator moves the body and the body engaging surface together relatively to the base in a first direction from a first initial position to an end position in the coupled state. The return device is configured to move the body engaging surface relatively to the body opposite to the first direction from the end position to a second initial position in the uncoupled state.
    Type: Grant
    Filed: July 2, 2018
    Date of Patent: February 15, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Franciscus Maria Joannes Linssen, Hubertus Renier Maria Van Lierop
  • VIBRATION ISOLATION SYSTEM AND LITHOGRAPHIC APPARATUS
    Publication number: 20210181639
    Abstract: A vibration isolation system including a support, a forward actuator and a return device. The support is for supporting the body on a base. The support has a body engaging surface and a base engaging surface. The base engaging surface is arranged to couple to the base. The support couples the body engaging surface to the body in a coupled state. The support uncouples the body engaging surface from the body in an uncoupled state. The forward actuator moves the body and the body engaging surface together relatively to the base in a first direction from a first initial position to an end position in the coupled state. The return device is configured to move the body engaging surface relatively to the body opposite to the first direction from the end position to a second initial position in the uncoupled state.
    Type: Application
    Filed: July 2, 2018
    Publication date: June 17, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Franciscus Maria Joannes LINSSEN, Hubertus Renier Maria VAN LIEROP