Abstract: Systems and methods for detecting defects on a reticle are provided. One system is configured for generating different stacked difference images for multiple instances of first patterned areas in different rows on a wafer based on images generated for the first patterned areas in the different rows. The system is also configured for performing double detection based on the different stacked difference images. The system then identifies defects on the reticle based on the defects detected by the double detection. As described further herein, the systems and methods detect defects from multiple reticle rows printed on a wafer, which can reduce noise and enable detection of substantially small repeater defects. The embodiments are particularly useful for high sensitivity repeater defect detection for extreme ultraviolet (EUV) reticles and multi-die reticles (MDR).

Abstract: A method of manufacturing a concrete product, includes: mixing a composition including a binder, water, and an aggregate to produce a concrete mixture, a major portion of a weight of the aggregate attributed to particles sized to pass through sieve openings of about 2.36 mm; imparting a form to the concrete mixture to provide a formed intermediate; conditioning the formed intermediate to obtain a conditioned intermediate; and curing the conditioned intermediate with a gas containing carbon dioxide to obtain the concrete product.

Abstract: The disclosure relates to a fast, stable method of output wavelength control in a DWDM optical device, and a circuit configured to perform the method. The method and circuit can control timing and overshoot during conditions of rapid operational changes, such as during power-on or restart of the device. The method and circuit includes optimized APC, TEC and electro-absorption (EA) modulator control hardware and algorithms, to effectively control transient processes. Software and circuitry based on the method(s) are achieved in part by optimizing APC, EA and TEC control algorithms. In combination with hardware/circuit optimization, one can achieve fast turn-on of an optical output signal at a stable wavelength. The method and circuit provides a stable power-up process in which a change of wavelength is small enough to meet DWDM specification requirements, to ensure the elimination and avoidance of crosstalk in adjacent channels in dense wave (sub)systems.

Abstract: The disclosure relates to a fast and stable method of output wavelength control in a DWDM optical device, and a circuit configured to perform the method. The method and circuit can control of timing and overshoot during conditions of rapid operational changes, such as during power-on or restart of the device. The method and circuit includes optimized APC, TEC and electro-absorption (EA) modulator control hardware and algorithms, to effectively control transient processes. In the present disclosure, software and circuitry based on the method(s) are achieved in part by optimizing APC, EA and TEC control algorithms. The present disclosure combines low-cost methodology and hardware. In combination with hardware/circuit optimization, one can achieve fast turn-on of an optical output signal at a stable wavelength.