Patents by Inventor Huei-Ming Ting

Huei-Ming Ting has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of sampling contaminants of semiconductor wafer carrier
    Patent number: 6923188
    Abstract: A method of sampling contaminants of a semiconductor wafer carrier. The method includes placing a tool chamber in a clean room and then placing and fixing the semiconductor wafer carrier with its opening facing downward inside the tool chamber. Then the method includes using at least one nozzle to spray extraction fluid uniformly on the inner surfaces of the semiconductor wafer carrier and collecting the extraction fluid.
    Type: Grant
    Filed: April 29, 2003
    Date of Patent: August 2, 2005
    Assignee: Powerchip Semiconductor Corp.
    Inventors: Rui-Hui Wen, Huei-Ming Ting
  • METHOD OF SAMPLING CONTAMINANTS OF A SEMICONDUCTOR WAFER CARRIER
    Publication number: 20040216766
    Abstract: A method of sampling contaminants of a semiconductor wafer carrier. The method includes placing a tool chamber in a clean room and then placing and fixing the semiconductor wafer carrier with its opening facing downward inside the tool chamber. Then the method includes using at least one nozzle to spray extraction fluid uniformly on the inner surfaces of the semiconductor wafer carrier and collecting the extraction fluid.
    Type: Application
    Filed: April 29, 2003
    Publication date: November 4, 2004
    Inventors: Rui-Hui Wen, Huei-Ming Ting