Abstract: A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler.

Abstract: A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler.

Abstract: An apparatus for monitoring the level of a liquid in a vessel comprises at least one metallic probe hermetically sealed within the vessel, the probe having a sealing end and at least a portion of the probe constituting a first electrode, the sealing end of the probe being encased within a glass material, a second electrode spaced apart from said first electrode in a manner such that the first and second electrode together form part of a capacitor, a mechanism for supplying an electrical current from an applied electrical current source to the capacitor, and a mechanism for monitoring capacitance of the capacitor.

Abstract: A method and apparatus for monitoring liquid levels within a vessel, particularly the level of an organometallic compound within a bubbler. A metallic probe (10) is hermetically sealed within a mounting that is sealed within the port of the vessel (2). The part of the probe that is sealed within the mounting is made of a nickel alloy and encased in a glass material by a metal to glass matched seal.