Patents by Inventor Hugh F. Stroupe

Hugh F. Stroupe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6447634
    Abstract: A process and apparatus for locally removing any material, such as a refractory metal, in particular tungsten, from any desired area of a wafer, such as an alignment mark area of a silicon wafer in process during the formation of integrated circuits thereon. The process comprising the steps of aligning said area of said wafer, such as an alignment mark on the wafer, to an etchant dispensing apparatus, placing the surface of the wafer adjacent at least a portion of an annular portion of the etchant dispensing apparatus, dispensing at least one etchant onto said area of said wafer, such as an alignment mark, and removing the at least one etching from the wafer.
    Type: Grant
    Filed: May 9, 2000
    Date of Patent: September 10, 2002
    Assignee: Micron Technology, Inc.
    Inventors: Russell C. Zahorik, Guy F. Hudson, Hugh F. Stroupe, Todd A. Dobson, Brian F. Gordon