Patents by Inventor Hugo Angustinus Joseph Cramer

Hugo Angustinus Joseph Cramer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
    Publication number: 20080088832
    Abstract: In a scatterometric method, different targets with different sensitivities to a parameter of interest are printed in a calibration matrix and different spectra obtained. Principal component analysis is applied to the different spectra to obtain a calibration function that is less sensitive to variation in the underlying structure than a calibration function obtained from spectra obtained from a single target.
    Type: Application
    Filed: October 13, 2006
    Publication date: April 17, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Hugo Angustinus Joseph Cramer, Antoine Gaston Marie Kiers