Abstract: A monitoring method and a device for chemical mechanical polishing are provided. The method includes: loading a to-be-polished wafer with a carrier, attaching the wafer to a polishing pad on a polishing platen, and supplying slurry between the polishing pad and the wafer with a slurry supply apparatus; conditioning the polishing pad with a conditioner, and obtaining strain data of the conditioner, wherein the conditioner includes a drive arm and a conditioning head, the conditioning head conditions the polishing pad with the support of the drive arm, the drive arm undergoes a strain in response to a force applied by the the conditioning head, and the strain data is used to indicate a strain value of the drive arm; determining a conditioning deviation based on the strain data, and determining a wear state of the polishing pad based on the conditioning deviation.

Abstract: The present invention discloses a method for optimizing sensor network node location in a geological CO2 storage area. In the method, by analyzing data in a monitoring area, such as geological data, geographical data, and meteorological data, analyzing influence factors of a CO2 leakage event and determining a sensitivity partition, designing different coverage control schemes of monitoring sensor network nodes, or intensively or sparsely arranging sensor monitoring nodes, a coverage network is described and optimally expressed on the basis of Delaunay triangulation. In the method for optimizing sensor network node location in a geological carbon dioxide storage area, the arrangement density of wireless sensor network nodes can be dynamically adjusted according to geological and geographical features of a detection area, and the arrangement optimization of a dynamic monitoring sensor network for coal seam carbon dioxide injection area leakage can be realized.

Abstract: The present invention discloses a method for optimizing sensor network node location in a geological CO2 storage area. In the method, by analyzing data in a monitoring area, such as geological data, geographical data, and meteorological data, analyzing influence factors of a CO2 leakage event and determining a sensitivity partition, designing different coverage control schemes of monitoring sensor network nodes, or intensively or sparsely arranging sensor monitoring nodes, a coverage network is described and optimally expressed on the basis of Delaunay triangulation. In the method for optimizing sensor network node location in a geological carbon dioxide storage area, the arrangement density of wireless sensor network nodes can be dynamically adjusted according to geological and geographical features of a detection area, and the arrangement optimization of a dynamic monitoring sensor network for coal seam carbon dioxide injection area leakage can be realized.