Patents by Inventor Hui-Hsiung Tuan

Hui-Hsiung Tuan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR CLEANING SEMICONDUCTOR DEVICE
    Publication number: 20080173339
    Abstract: A method for cleaning semiconductor device is disclosed. The steps include providing a mask-protective device, providing a mask with a defined pattern, and combining the mask-protective device with the cleaned mask layer, such that the space between the mask-protective device and the mask layer can fill with the cleaning gas after combining process. Thus, the mask layer would not be polluted by the particle is generated from the environment, such that the resolution of the image and the reliability can be increased.
    Type: Application
    Filed: March 28, 2008
    Publication date: July 24, 2008
    Inventors: Yen-Wu HSIEH, Hui-Hsiung Tuan
  • Method for cleaning semiconductor device
    Publication number: 20060012762
    Abstract: A method for cleaning semiconductor device is disclosed. The steps include providing a mask-protective device, providing a mask with a defined pattern, and combining the mask-protective device with the cleaned mask layer, such that the space between the mask-protective device and the mask layer can fill with the cleaning gas after combining process. Thus, the mask layer would not be polluted by the particle is generated from the environment, such that the resolution of the image and the reliability can be increased.
    Type: Application
    Filed: March 23, 2005
    Publication date: January 19, 2006
    Inventors: Yen-Wu Hsieh, Hui-Hsiung Tuan