Patents by Inventor Hui Kuen CHAN

Hui Kuen CHAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate conveyance robot and operating method thereof
    Patent number: 10014205
    Abstract: A substrate conveyance robot has an end effector provided to a robot arm and including a substrate holding unit configured to hold a substrate, arm drive unit configured to drive the robot arm, a robot control unit configured to control the arm drive unit, and a holding force detection unit configured to detect a substrate holding force exerted by the substrate holding unit. The robot control unit controls the arm drive unit based on an upper limit value of at least one of acceleration and speed of the end effector which are determined in accordance with the substrate holding force detected by the holding force detection unit.
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: July 3, 2018
    Assignees: KAWASAKI JUKOGYO KABUSHIKI KAISHA, KAWASAKI ROBOTICS (USA), INC.
    Inventors: Masaya Yoshida, Takao Yamaguchi, Yuji Tanaka, Hajime Nakahara, Avish Ashok Bharwani, Ming Zeng, Hui Kuen Chan
  • SUBSTRATE CONVEYANCE ROBOT AND OPERATING METHOD THEREOF
    Publication number: 20170170050
    Abstract: A substrate conveyance robot has an end effector provided to a robot arm and including a substrate holding unit configured to hold a substrate, arm drive unit configured to drive the robot arm, a robot control unit configured to control the arm drive unit, and a holding force detection unit configured to detect a substrate holding force exerted by the substrate holding unit. The robot control unit controls the arm drive unit based on an upper limit value of at least one of acceleration and speed of the end effector which are determined in accordance with the substrate holding force detected by the holding force detection unit.
    Type: Application
    Filed: December 14, 2015
    Publication date: June 15, 2017
    Inventors: Masaya YOSHIDA, Takao YAMAGUCHI, Yuji TANAKA, Hajime NAKAHARA, Avish Ashok BHARWANI, Ming ZENG, Hui Kuen CHAN