Abstract: A package includes a die. The die includes: a substrate; electrical components at a front side of the substrate; an interconnect structure at the front side of the substrate and electrically coupled to the electrical components, where an uppermost conductive line of the interconnect structure is an aluminum line; and a via extending from the uppermost conductive line to a backside of the substrate. The package further includes: a molding material around the die; a first redistribution structure (RDS) under the die and the molding material; a second RDS over the die and the molding material, where each of the first RDS and the second RDS comprises dielectric layers and conductive features in the dielectric layers, where the via of the die is electrically coupled to the first RDS and the second RDS; and a second die over and electrically coupled to the second RDS.

Abstract: A method includes forming signal lines in a pair of neighboring metal layers of a semiconductor device, and forming first dummy conductive cells in an empty area without metal lines passing therethrough, between the pair of neighboring metal layers. At least two dummy conductive cells of the first dummy conductive cells that are separated from each other, and the at least two dummy conductive cells fully overlap one of the signal lines in plan view.

Abstract: A method includes forming signal lines in a pair of neighboring metal layers of a semiconductor device, and forming first dummy conductive cells in an empty area without metal lines passing therethrough, between the pair of neighboring metal layers. At least two dummy conductive cells of the first dummy conductive cells that are separated from each other, and the at least two dummy conductive cells fully overlap one of the signal lines in plan view.

Abstract: A method includes forming signal lines in a pair of neighboring metal layers of a semiconductor device, and forming first dummy conductive cells in an empty area without metal lines passing therethrough, between the pair of neighboring metal layers. At least two dummy conductive cells of the first dummy conductive cells that are separated from each other, and the at least two dummy conductive cells fully overlap one of the signal lines in plan view.

Abstract: A method is disclosed and includes forming a plurality of dummy conductive cells that provides different densities in empty areas in metal layers of a semiconductor device according to overlap conditions of the empty areas each arranged between a pair of neighboring metal layers of metal layers. Forming the plurality of dummy conductive cells includes operations of forming a group of dummy conductive cells in a single empty area of the empty areas when the single empty area in one pair of the neighboring metal layers is overlapped by a signal line in the same pair of the neighboring metal layers. When viewed in plan view, projection areas of the group of dummy conductive cells are vertically overlapped by a projection area of the signal line. A semiconductor device is also disclosed herein.

Abstract: A method is disclosed and includes forming a plurality of dummy conductive cells that provides different densities in empty areas in metal layers of a semiconductor device according to overlap conditions of the empty areas each arranged between a pair of neighboring metal layers of metal layers. Forming the plurality of dummy conductive cells includes operations of forming a group of dummy conductive cells in a single empty area of the empty areas when the single empty area in one pair of the neighboring metal layers is overlapped by a signal line in the same pair of the neighboring metal layers. When viewed in plan view, projection areas of the group of dummy conductive cells are vertically overlapped by a projection area of the signal line. A semiconductor device is also disclosed herein.

Abstract: A semiconductor device includes metal layers, first dummy conductive cells, and groups of second dummy conductive cells. The metal layers include empty areas and are grouped into pairs of neighboring metal layers. The first dummy conductive cells are each formed in each of the empty areas in each of the pairs of neighboring metal layers that is overlapped by another empty area or a line in the same pair of neighboring metal layers. Each group of the second dummy conductive cells is formed in each of the empty areas in each of the pairs of neighboring metal layers that is overlapped by a signal line in the same pair of neighboring metal layer.

Abstract: A semiconductor device includes metal layers, first dummy conductive cells, and groups of second dummy conductive cells. The metal layers include empty areas and are grouped into pairs of neighboring metal layers. The first dummy conductive cells are each formed in each of the empty areas in each of the pairs of neighboring metal layers that is overlapped by another empty area or a line in the same pair of neighboring metal layers. Each group of the second dummy conductive cells is formed in each of the empty areas in each of the pairs of neighboring metal layers that is overlapped by a signal line in the same pair of neighboring metal layer.

Abstract: A method is disclosed that includes the operations outlined below. A plurality of dummy conductive cells that provide different densities are formed in a plurality of empty areas in a plurality of metal layers of a semiconductor device according to overlap conditions of the empty areas between each pair of neighboring metal layers.

Abstract: A method is disclosed that includes the operations outlined below. A plurality of dummy conductive cells that provide different densities are formed in a plurality of empty areas in a plurality of metal layers of a semiconductor device according to overlap conditions of the empty areas between each pair of neighboring metal layers.