Patents by Inventor HUI-TING LIN

HUI-TING LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11968908
    Abstract: In an embodiment, a method includes: forming a first inter-metal dielectric (IMD) layer over a semiconductor substrate; forming a bottom electrode layer over the first IMD layer; forming a magnetic tunnel junction (MTJ) film stack over the bottom electrode layer; forming a first top electrode layer over the MTJ film stack; forming a protective mask covering a first region of the first top electrode layer, a second region of the first top electrode layer being uncovered by the protective mask; forming a second top electrode layer over the protective mask and the first top electrode layer; and patterning the second top electrode layer, the first top electrode layer, the MTJ film stack, the bottom electrode layer, and the first IMD layer with an ion beam etching (IBE) process to form a MRAM cell, where the protective mask is etched during the IBE process.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: April 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tai-Yen Peng, Hui-Hsien Wei, Han-Ting Lin, Sin-Yi Yang, Yu-Shu Chen, An-Shen Chang, Qiang Fu, Chen-Jung Wang
  • Patent number: 11966077
    Abstract: A light emission apparatus includes a laser diode configured to emit a light; a laser driver electrically coupled to the laser diode, the laser driver being configured to drive the laser diode to generate the light; and an optical module arranged to receive the light emitted by the laser diode, the optical module comprising at least one optical element and being configured to adjust the light and emits a transmitting light; wherein the transmitting light emits from the optical module with an illumination angle and the optical module adjusts the light to vary the illumination angle.
    Type: Grant
    Filed: July 8, 2019
    Date of Patent: April 23, 2024
    Assignee: Artilux, Inc.
    Inventors: Yun-Chung Na, Chien-Lung Chen, Chieh-Ting Lin, Yu-Yi Hsu, Hui-Wen Chen, Bo-Jiun Chen, Shih-Tai Chuang
  • Patent number: 11923301
    Abstract: A method of manufacturing a semiconductor device, including: forming a plurality of gate strips, each gate strip is a gate terminal of a transistor; forming a plurality of first contact vias connected to a part of the gate strips; forming a plurality of first metal strips above the plurality of gate strips; connecting one of the first metal strips to one of the first contact vias; forming a plurality of second metal strips above the plurality of first metal strips, wherein the plurality of second metal strips are co-planar, each second metal strip and one of the first metal strips are crisscrossed from top view; a length between two adjacent gate strips is twice as a length between two adjacent second metal strips, and a length of said one of the first metal strips is smaller than two and a half times as the length between two adjacent gate strips.
    Type: Grant
    Filed: December 15, 2022
    Date of Patent: March 5, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shih-Wei Peng, Hui-Ting Yang, Wei-Cheng Lin, Jiann-Tyng Tzeng
  • Patent number: 11916077
    Abstract: The present disclosure describes an apparatus with a local interconnect structure. The apparatus can include a first transistor, a second transistor, a first interconnect structure, a second interconnect structure, and a third interconnect structure. The local interconnect structure can be coupled to gate terminals of the first and second transistors and routed at a same interconnect level as reference metal lines coupled to ground and a power supply voltage. The first interconnect structure can be coupled to a source/drain terminal of the first transistor and routed above the local interconnect structure. The second interconnect structure can be coupled to a source/drain terminal of the second transistor and routed above the local interconnect structure. The third interconnect structure can be routed above the local interconnect structure and at a same interconnect level as the first and second interconnect structures.
    Type: Grant
    Filed: May 24, 2021
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Liang Chen, Cheng-Chi Chuang, Chih-Ming Lai, Chia-Tien Wu, Charles Chew-Yuen Young, Hui-Ting Yang, Jiann-Tyng Tzeng, Ru-Gun Liu, Wei-Cheng Lin, Lei-Chun Chou, Wei-An Lai
  • Publication number: 20230369250
    Abstract: A chip package structure is provided. The chip package structure includes a wiring substrate having a first conductive pad. The chip package structure includes a chip structure over the wiring substrate. The chip package structure includes an antiwarpage structure over the wiring substrate. The antiwarpage structure surrounds the chip structure. The chip package structure includes a first anchor structure on the first conductive pad of the wiring substrate and adjacent to a first lower portion of the antiwarpage structure. The first lower portion is between the first anchor structure and the chip structure, and the first anchor structure and the first conductive pad are electrically insulated from the chip structure.
    Type: Application
    Filed: July 28, 2023
    Publication date: November 16, 2023
    Inventors: Hui-Ting LIN, Chin-Fu KAO, Chen-Shien CHEN
  • Publication number: 20230352356
    Abstract: A package structure is provided. The package structure includes a substrate, a cover element, a semiconductor device, a protruding element, an adhesive element, and an electrical connector. The cover element is disposed on the substrate and having a recess. The semiconductor device is disposed on the substrate and disposed in the space surrounded by the cover element. The protruding element extends from the substrate and disposed in the recess. The adhesive element is disposed in the recess. The electrical connector is in contact with the substrate and the semiconductor device.
    Type: Application
    Filed: July 13, 2023
    Publication date: November 2, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hui-Ting LIN, Chin-Fu KAO, Chen-Shien CHEN
  • Patent number: 11764168
    Abstract: A chip package structure is provided. The chip package structure includes a wiring substrate having a surface. The chip package structure includes a chip structure over the surface of the wiring substrate. The chip package structure includes an antiwarpage structure over the surface of the wiring substrate. The antiwarpage structure surrounds the chip structure. The chip package structure includes a first anchor structure affixed to the surface of the wiring substrate and adjacent to a first lower portion of the antiwarpage structure. The first lower portion is between the first anchor structure and the chip structure, and the first anchor structure is electrically isolated from the chip structure.
    Type: Grant
    Filed: May 6, 2021
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hui-Ting Lin, Chin-Fu Kao, Chen-Shien Chen
  • Patent number: 11749575
    Abstract: A package structure is provided. The package structure includes a substrate, a cover element, a semiconductor device, a protruding element, and an adhesive element. The cover element is disposed on the substrate and having a ring portion, a space is surrounded by the ring portion, and a recess is formed on a surface of the ring portion that faces the substrate. The semiconductor device is disposed on the substrate and disposed in the space surrounded by the ring portion, wherein the semiconductor device is spaced apart from the recess by the ring portion. The protruding element extends from the substrate and disposed in the recess. The adhesive element is disposed in the recess, wherein in a top view, the semiconductor device is surrounded by the protruding element.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: September 5, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hui-Ting Lin, Chin-Fu Kao, Chen-Shien Chen
  • Publication number: 20230062958
    Abstract: A package structure is provided. The package structure includes a substrate, a cover element, a semiconductor device, a protruding element, and an adhesive element. The cover element is disposed on the substrate and having a ring portion, a space is surrounded by the ring portion, and a recess is formed on a surface of the ring portion that faces the substrate. The semiconductor device is disposed on the substrate and disposed in the space surrounded by the ring portion, wherein the semiconductor device is spaced apart from the recess by the ring portion. The protruding element extends from the substrate and disposed in the recess. The adhesive element is disposed in the recess, wherein in a top view, the semiconductor device is surrounded by the protruding element.
    Type: Application
    Filed: August 31, 2021
    Publication date: March 2, 2023
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hui-Ting LIN, Chin-Fu KAO, Chen-Shien CHEN
  • Publication number: 20230032570
    Abstract: A bonding tool and a bonding method are provided. The method includes attaching a semiconductor die to a bonding tool having a first surface, wherein the bonding tool comprises a bending member movably arranged in a trench of the bonding tool, and the bending member protrudes from the first surface and bends the semiconductor die; moving the semiconductor die toward a semiconductor wafer to cause a retraction of the bending member and a partial bonding at a portion of the semiconductor die and the semiconductor wafer; and causing a full bonding between the semiconductor die and the semiconductor wafer subsequent to the partial bonding.
    Type: Application
    Filed: February 15, 2022
    Publication date: February 2, 2023
    Inventors: CHIH-YUAN CHIU, SHIH-YEN CHEN, CHI-CHUN PENG, HONG-KUN CHEN, HUI-TING LIN
  • Publication number: 20220359422
    Abstract: A chip package structure is provided. The chip package structure includes a wiring substrate having a surface. The chip package structure includes a chip structure over the surface of the wiring substrate. The chip package structure includes an antiwarpage structure over the surface of the wiring substrate. The antiwarpage structure surrounds the chip structure. The chip package structure includes a first anchor structure affixed to the surface of the wiring substrate and adjacent to a first lower portion of the antiwarpage structure. The first lower portion is between the first anchor structure and the chip structure, and the first anchor structure is electrically isolated from the chip structure.
    Type: Application
    Filed: May 6, 2021
    Publication date: November 10, 2022
    Inventors: Hui-Ting LIN, Chin-Fu KAO, Chen-Shien CHEN
  • Patent number: 11424408
    Abstract: An ReRAM structure includes a dielectric layer. A first ReRAM and a second ReRAM are disposed on the dielectric layer. The second ReRAM is at one side of the first ReRAM. A trench is disposed in the dielectric layer between the first ReRAM and the second ReRAM. The first ReRAM includes a bottom electrode, a variable resistive layer and a top electrode. The variable resistive layer is between the bottom electrode and the top electrode. A width of the bottom electrode is smaller than a width of the top electrode. The width of the bottom electrode is smaller than a width of the variable resistive layer.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: August 23, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Min Chou, Kuo-Chih Lai, Wei-Ming Hsiao, Hui-Ting Lin, Szu-Yao Yu, Nien-Ting Ho, Hsin-Fu Huang, Chin-Fu Lin
  • Publication number: 20210351347
    Abstract: An ReRAM structure includes a dielectric layer. A first ReRAM and a second ReRAM are disposed on the dielectric layer. The second ReRAM is at one side of the first ReRAM. A trench is disposed in the dielectric layer between the first ReRAM and the second ReRAM. The first ReRAM includes a bottom electrode, a variable resistive layer and a top electrode. The variable resistive layer is between the bottom electrode and the top electrode. A width of the bottom electrode is smaller than a width of the top electrode. The width of the bottom electrode is smaller than a width of the variable resistive layer.
    Type: Application
    Filed: July 26, 2021
    Publication date: November 11, 2021
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Min Chou, Kuo-Chih Lai, Wei-Ming Hsiao, Hui-Ting Lin, Szu-Yao Yu, Nien-Ting Ho, Hsin-Fu Huang, Chin-Fu Lin
  • Patent number: 11165019
    Abstract: An ReRAM structure includes a dielectric layer. A first ReRAM and a second ReRAM are disposed on the dielectric layer. The second ReRAM is at one side of the first ReRAM. A trench is disposed in the dielectric layer between the first ReRAM and the second ReRAM. The first ReRAM includes a bottom electrode, a variable resistive layer and a top electrode. The variable resistive layer is between the bottom electrode and the top electrode. A width of the bottom electrode is smaller than a width of the top electrode. The width of the bottom electrode is smaller than a width of the variable resistive layer.
    Type: Grant
    Filed: September 20, 2019
    Date of Patent: November 2, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Shih-Min Chou, Kuo-Chih Lai, Wei-Ming Hsiao, Hui-Ting Lin, Szu-Yao Yu, Nien-Ting Ho, Hsin-Fu Huang, Chin-Fu Lin
  • Patent number: 11152295
    Abstract: A semiconductor package structure includes a first package including a bonding region and a periphery region surrounding the bonding region, at least one insulating structure disposed in the bonding region of the first package, a second package disposed over the first package and the insulating structure in the bonding region, and a plurality of connectors disposed between the first package and the second package. The plurality of connectors provide electrical connection between the first package and the second package. Further, the insulating structure penetrates the first package and is spaced apart from the plurality of connectors.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: October 19, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chih-Hao Lin, Chien-Kuo Chang, Tzu-Kai Lan, Hui-Ting Lin, Chun-Min Lin
  • Publication number: 20210057643
    Abstract: An ReRAM structure includes a dielectric layer. A first ReRAM and a second ReRAM are disposed on the dielectric layer. The second ReRAM is at one side of the first ReRAM. A trench is disposed in the dielectric layer between the first ReRAM and the second ReRAM. The first ReRAM includes a bottom electrode, a variable resistive layer and a top electrode. The variable resistive layer is between the bottom electrode and the top electrode. A width of the bottom electrode is smaller than a width of the top electrode. The width of the bottom electrode is smaller than a width of the variable resistive layer.
    Type: Application
    Filed: September 20, 2019
    Publication date: February 25, 2021
    Inventors: Shih-Min Chou, Kuo-Chih Lai, Wei-Ming Hsiao, Hui-Ting Lin, Szu-Yao Yu, Nien-Ting Ho, Hsin-Fu Huang, Chin-Fu Lin
  • Publication number: 20190318987
    Abstract: A semiconductor package structure includes a first package including a bonding region and a periphery region surrounding the bonding region, at least one insulating structure disposed in the bonding region of the first package, a second package disposed over the first package and the insulating structure in the bonding region, and a plurality of connectors disposed between the first package and the second package. The plurality of connectors provide electrical connection between the first package and the second package. Further, the insulating structure penetrates the first package and is spaced apart from the plurality of connectors.
    Type: Application
    Filed: April 13, 2018
    Publication date: October 17, 2019
    Inventors: CHIH-HAO LIN, CHIEN-KUO CHANG, TZU-KAI LAN, HUI-TING LIN, CHUN-MIN LIN