Abstract: In a method of coating a photo resist over a wafer, dispensing the photo resist from a nozzle over the wafer is started while rotating the wafer, and dispensing the photo resist is stopped while rotating the wafer. After starting and before stopping the dispensing the photo resist, a wafer rotation speed is changed at least 4 times. During dispensing, an arm holding the nozzle may move horizontally. A tip end of the nozzle may be located at a height of 2.5 mm to 3.5 mm from the wafer.

Abstract: A hydrogen-producing catalytic converter is arranged in an exhaust pipe of an engine to absorb heat from engine waste gas for actuating hydrogen production, and includes a preheating body and a catalyst bed enclosed in a heating pipe, and a plurality of heating catalysts filled between the heating pipe and the preheating body and the catalyst bed. The heating pipe has two closed ends, one of which has a gas inlet pipe connected thereto to communicate the heating pipe with a combustion gas tank, from which an oxygen-containing combustion gas is supplied into the heating pipe to heat the heating catalysts. The heating catalysts in turn heat hydrogen-producing catalysts in the catalyst bed to a working temperature thereof, so that an engine hydrogenation process can be performed as soon as the engine is started to ensure reduced air pollution and fuel consumption in the whole course of engine operation.

Abstract: A hydrogenation system is disclosed for controlling the air-fuel ratio in an internal combustion engine and using engine waste heat to produce hydrogen for supplying into the engine to achieve the purposes of reducing air pollution and saving fuel; and includes a fuel-water solution supply unit, a catalytic converter, a first temperature detecting switch, a fuel supply control unit, a coolant supply unit and a second temperature detecting switch. When the first temperature detecting switch detects the catalytic converter has reached a working temperature for producing hydrogen, an amount of fuel-water solution is supplied to the catalytic converter and subjected to molecular rearrangement for producing hydrogen gas, which is sent into the engine to burn along with fuel. When the second temperature detecting switch detects the catalytic converter has reached a safe temperature, coolant is supplied from the coolant supply unit to the catalytic converter to lower the latter's temperature.