Abstract: A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.

Abstract: An air purifier and a purifying method are provided. The air purifier includes a housing, a sterilization and ozone-generating unit, a physical filter, a first ozone-removing unit, and a cover. The housing has a sidewall and a bottom surface to define a processing space, wherein an upper end of the housing has an air inlet and the sidewall has an air outlet. The sterilization and ozone-generating unit is disposed in the processing space. The physical filter is disposed in the processing space, extends along the sidewall, and surrounds the sterilization and ozone-generating unit. The first ozone-removing unit is disposed between the physical filter and the sidewall. The cover is openably disposed at the air inlet.

Abstract: A sterilization device with dose function is provided. The sterilization device includes a sterilization container, an ultraviolet sterilization module, an ozone sensing module, a sterilization time counter, a dose controller and an ozone removal module. The ultraviolet sterilization module is disposed in the sterilization container to sterilize an article by emitting an ultraviolet light. The ozone sensing module is used to sense an ozone concentration of the sterilization container. The sterilization time counter is used to calculate a sterilization time. The dose controller is used to receive a sensing signal of the ozone concentration and a counting signal of the sterilization time to obtain an ozone dose. The ozone removal module is disposed in the sterilization container to remove or purify the ozone and reduce the ozone concentration in the sterilization container.

Abstract: An air purifier and a purifying method are provided. The air purifier includes a housing, a sterilization and ozone-generating unit, a physical filter, a first ozone-removing unit, and a cover. The housing has a sidewall and a bottom surface to define a processing space, wherein an upper end of the housing has an air inlet and the sidewall has an air outlet. The sterilization and ozone-generating unit is disposed in the processing space. The physical filter is disposed in the processing space, extends along the sidewall, and surrounds the sterilization and ozone-generating unit. The first ozone-removing unit is disposed between the physical filter and the sidewall. The cover is openably disposed at the air inlet.

Abstract: A carbonized material, a device for removing ozone, and a method for removing ozone are provided. The carbonized material has at least a carbonyl-containing group, alkylol group, and carbon having sp2 hybrid orbital. In particular, the at least one carbonyl-containing group has a carbon content from 10 atom % to 30 atom %, based on the total carbon atoms of the at least one carbonyl-containing group, the at least one alkylol group, and the at least one carbon having sp2 hybrid orbital.

Abstract: A carbonized material, a device for removing ozone, and a method for removing ozone are provided. The carbonized material has at least a carbonyl-containing group, alkylol group, and carbon having sp2 hybrid orbital. In particular, the at least one carbonyl-containing group has a carbon content from 10 atom % to 30 atom %, based on the total carbon atoms of the at least one carbonyl-containing group, the at least one alkylol group, and the at least one carbon having sp2 hybrid orbital.

Abstract: A method for fabricating a sensor material for detecting molecular contaminants, including the steps of: providing an aqueous solution of a metal oxide precursor; mixing titanium dioxide nanotubes with the aqueous solution of the metal oxide to form a mixture; adjusting a pH value of the mixture with a weak base until the pH value is neutral; dispersing the mixture in water and heating the mixture; and filtering the mixture to retain a solid part, and calcining the solid part under a continuous flow of oxygen to form metal oxide loaded titanium dioxide nanotubes. The disclosure also provides a sensor material and a detecting method using the sensor material for ppm-ppb-ppt concentration level detection of molecular contaminants.

Abstract: A system for detection of gas leakage sources. An open-path FTIR detection system is located before the return filter of recirculating air of a factory to detect gas composition of recirculating air and transmits the result to a data server through a communication network. A multi-port extractive FTIR system is located in the factory to collect and detect gas sample of local area air using pipelines located in different areas and transmits the result of gas composition to the data server through the communication network. An IR monitor system obtains the gas composition from the data server through the communication network. A process exhaust management system obtains the gas composition from the IR monitor system through the communication network for the analysis of a gas leakage source.

Abstract: A gas analysis system. The system includes a Fourier transform infrared (FTIR) spectrometer, a signal transformation module, an unknown chemical analysis module, a calibration model determination module, and a gas concentration calculation module. The signal transformation module receives electronic signals corresponding respectively to background and sample interferograms corresponding to a sample gas from the FTIR spectrometer for further calculation to obtain an absorption spectrum of the sample gas. The unknown chemical analysis module qualitatively analyzes the absorption spectrum of the sample gas to determine the chemical species in the sample gas. The calibration model determination module decides a calibration model. The gas concentration calculation module calculates the gas concentration of each chemical species according to the absorption spectrum, the calibration model and a standard spectrum of the chemical species.

Abstract: A system for detection of gas leakage sources. An open-path FTIR detection system is located before the return filter of recirculating air of a factory to detect gas composition of recirculating air and transmits the result to a data server through a communication network. A multi-port extractive FTIR system is located in the factory to collect and detect gas sample of local area air using pipelines located in different areas and transmits the result of gas composition to the data server through the communication network. An IR monitor system obtains the gas composition from the data server through the communication network. A process exhaust management system obtains the gas composition from the IR monitor system through the communication network for the analysis of a gas leakage source.

Abstract: A gas analysis system. The system includes a Fourier transform infrared (FTIR) spectrometer, a signal transformation module, an unknown chemical analysis module, a calibration model determination module, and a gas concentration calculation module. The signal transformation module receives electronic signals corresponding respectively to background and sample interferograms corresponding to a sample gas from the FTIR spectrometer for further calculation to obtain an absorption spectrum of the sample gas. The unknown chemical analysis module qualitatively analyzes the absorption spectrum of the sample gas to determine the chemical species in the sample gas. The calibration model determination module decides a calibration model. The gas concentration calculation module calculates the gas concentration of each chemical species according to the absorption spectrum, the calibration model and a standard spectrum of the chemical species.