Patents by Inventor Huibert Visser

Huibert Visser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10578545
    Abstract: An aerosol detector system is described for spatially resolved detection of an aerosol distribution in an area. The system includes a wide field polarization preserving telescope having telecentric imaging optics for imaging the earth surface onto a detector that receives phase stepped images from the telescope, A controller is arranged to provide a resulting image as a function of corresponding pixel values of the multiple images to produce an image at a spatially resolved polarization state corresponding to said aerosol substance.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: March 3, 2020
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Hedser van Brug, Huibert Visser
  • Publication number: 20190368926
    Abstract: Correction optics (10) are disposed in an optical path directly behind an entry slit (1) of a spectrometer (100) and configured to warp a straight object line shape (A1) of the entry slit (1) into a curved object line shape (B1) from a point of view of the projection optics (2,3,4). The warping of the correction optics (10) is configured such that a curvature (R1) of the curved object line shape (B1) counteracts an otherwise distorting curvature (R5) in a projection (A5) of the straight object line shape (A1) by the projection optics (2,3,4) without the correction optics (10). As a result, the spectrally resolved image (B5) comprises a plurality of parallel straight projected line shapes formed by spectrally resolved projections of the straight object line shape (A1).
    Type: Application
    Filed: February 7, 2018
    Publication date: December 5, 2019
    Inventors: Huibert VISSER, Hedser VAN BRUG
  • Patent number: 10473526
    Abstract: The invention pertains to a method of spatially resolved detection of a gas substance in an area, comprising: imaging the area on a first image sensor, in a wavelength spectrum including an absorption wavelength peak corresponding to said gas substance; imaging the area on a second image sensor, to provide for each pixel of the first image a corresponding pixel of the second image for respective on- and off-peak wavelengths relative to the absorption wavelength; and providing a difference image as a function of the two pixel values of first and second image sensors to produce an image of the spatially resolved absorption wavelength corresponding to said gas substance.
    Type: Grant
    Filed: November 13, 2015
    Date of Patent: November 12, 2019
    Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
    Inventors: Huibert Visser, Hedser van Brug
  • Publication number: 20190323821
    Abstract: Interferometer system, including optical means (2, 3, 4, 5) arranged for directing light along a first interferometer path and (separate) second interferometer path, and for combining the light for allowing interferometry, characterized in that the first interferometer path (PI) is provided with a first light transmitting structure (10) having a rotational position that is adjustable with respect to an optical axis of the first path.
    Type: Application
    Filed: December 21, 2017
    Publication date: October 24, 2019
    Inventors: Huibert VISSER, Hedser VAN BRUG
  • Publication number: 20180283949
    Abstract: The invention pertains to a method of spatially resolved detection of a gas substance in an area, comprising: imaging the area on a first image sensor, in a wavelength spectrum including an absorption wavelength peak corresponding to said gas substance; imaging the area on a second image sensor, to provide for each pixel of the first image a corresponding pixel of the second image for respective on- and off-peak wavelengths relative to the absorption wavelength; and providing a difference image as a function of the two pixel values of first and second image sensors to produce an image of the spatially resolved absorption wavelength corresponding to said gas substance.
    Type: Application
    Filed: November 13, 2015
    Publication date: October 4, 2018
    Inventors: Huibert Visser, Hedser van Brug
  • Publication number: 20180284013
    Abstract: The invention pertains to an aerosol detector system for spatially resolved detection of an aerosol distribution in an area, comprising: a wide field polarization preserving telescope having telecentric imaging optics for imaging the earth surface onto a detector; said detector receiving phase stepped images imaged by said telescope; and a controller coupled to the detector, arranged to provide a resulting image as a function of corresponding pixel values of the multiple images to produce an image at a spatially resolved polarization state corresponding to said aerosol substance; wherein the telescope comprises a first telecentric imaging lens group and a wavelength filter positioned in a field image of the first telescope telecentric beam to define a spectral range of interest; the telescope further comprising: a converging lens group converging the beam to a pupil stop; relay optics including a second telecentric imaging lens group arranged to generate a telecentric beam; and splitter optics, comprising a p
    Type: Application
    Filed: March 30, 2016
    Publication date: October 4, 2018
    Inventors: Hedser van Brug, Huibert Visser
  • Patent number: 9383490
    Abstract: A light beam is applied to a front surface of an optical depolarizer. The depolarizer rotates the polarization of light received on different surface positions by different amounts, so that the average incoming polarization is scrambled. The depolarizer has a first and second body that transmit first and second polarization components of the beam with mutually different speeds of light. Each body has two wedge shaped parts of variable thickness, corresponding wedge shaped parts in the two bodies providing light paths of substantially position independent lengths, but with variable rotation of polarization. The wedge shape parts of the front body form a concave input surface for the incoming beam. This prevents cross-over of light between the different wedge shaped parts.
    Type: Grant
    Filed: December 10, 2012
    Date of Patent: July 5, 2016
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Borgert Kruizinga, Huibert Visser, Michiel David Nijkerk
  • Patent number: 9323070
    Abstract: A manufacturing method for a grating is disclosed for the angular dispersion of light impinging the grating. The grating comprises tapered structures and cavities. A cavity width and/or corrugation amplitude is varied for achieving a desired grating efficiency according to calculation. A method is disclosed for conveniently creating gratings with variable cavity width and/or corrugation amplitude. The method comprises the step of anisotropically etching a groove pattern into a grating master. Optionally a replica is produced that is complementary to the grating master. By variation of an etching resist pattern, the cavity width of the grating may be varied allowing the optimization towards different efficiency goals.
    Type: Grant
    Filed: June 7, 2012
    Date of Patent: April 26, 2016
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Henri Johannes Petrus Vink, Huibert Visser, Aaldert Hidde Van Amerongen
  • Patent number: 9304300
    Abstract: An anamorphotic telescope has mutually different magnification along directions of minimum and maximum magnification in an image plane. A spectroscope with an elongated input slit directed along one of the directions of maximum and minimum magnification may be located in the image plane. The anamorphotic telescope has a first and second reflector lens with mutually different first and second radii of curvature in directions (y, x) that optically correspond to directions of minimum and maximum magnification. At least one of the first and second reflector lens has a variable radius of curvature in one direction (x), which varies as a function of position in the other direction (y), the variable radius of curvature decreasing in a direction of the angle from the view direction to the light directed by the first reflector lens to the second reflector lens.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: April 5, 2016
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
    Inventors: Huibert Visser, Borgert Kruizinga, Michiel David Nijkerk
  • Publication number: 20150034591
    Abstract: A manufacturing method for a grating is disclosed for the angular dispersion of light impinging the grating. The grating comprises tapered structures and cavities. A cavity width and/or corrugation amplitude is varied for achieving a desired grating efficiency according to calculation. A method is disclosed for conveniently creating gratings with variable cavity width and/or corrugation amplitude. The method comprises the step of anisotropically etching a groove pattern into a grating master. Optionally a replica is produced that is complementary to the grating master. By variation of an etching resist pattern, the cavity width of the grating may be varied allowing the optimization towards different efficiency goals.
    Type: Application
    Filed: June 7, 2012
    Publication date: February 5, 2015
    Applicants: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO, Stichting SRON Netherlands Institute for Space Research
    Inventors: Henri Johannes Petrus Vink, Huibert Visser, Aaldert Hide Van Amerongen
  • Publication number: 20140320852
    Abstract: A light beam is applied to a front surface of an optical depolarizer. The depolarizer rotates the polarization of light received on different surface positions by different amounts, so that the average incoming polarization is scrambled. The depolarizer has a first and second body that transmit first and second polarization components of the beam with mutually different speeds of light. Each body has two wedge shaped parts of variable thickness, corresponding wedge shaped parts in the two bodies providing light paths of substantially position independent lengths, but with variable rotation of polarization. The wedge shape parts of the front body form a concave input surface for the incoming beam. This prevents cross-over of light between the different wedge shaped parts.
    Type: Application
    Filed: December 10, 2012
    Publication date: October 30, 2014
    Inventors: Borgert Kruizinga, Huibert Visser, Michiel David Nijkerk
  • Patent number: 8717535
    Abstract: Apparatus and methods are used to calibrate an array of individually controllable elements within a lithographic apparatus. A calibration unit can switch between a first state in which the modulated beam of radiation passes into a projection system for projecting the modulated beam of radiation onto a substrate and a second state in which a portion of the modulated beam of radiation is inspected by the calibration unit. The calibration unit generates calibration data, or alternatively, updates calibration data, based on the inspection of the modulated beam of radiation. An array controller uses the calibration data to provide control signals to elements of an array of individually controllable elements, which are subsequently configured in response to the control signals.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: May 6, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Huibert Visser, Martinus Hendricus Hendricus Hoeks, Borgert Kruizinga, Bob Streefkerk, Patricius Aloysius Jacobus Tinnemans, Erwin John Van Zwet, Roeland Nicolaas Maria Vanneer, Marcus Gerhardus Hendrikus Meijerink, Nicolaas Cornelis Johannes Van Der Valk, Har Van Himbergen
  • Publication number: 20130293885
    Abstract: An anamorphotic telescope has mutually different magnification along directions of minimum and maximum magnification in an image plane. A spectroscope with an elongated input slit directed along one of the directions of maximum and minimum magnification may be located in the image plane. The anamorphotic telescope has a first and second reflector lens with mutually different first and second radii of curvature in directions (y, x) that optically correspond to directions of minimum and maximum magnification. At least one of the first and second reflector lens has a variable radius of curvature in one direction (x), which varies as a function of position in the other direction (y), the variable radius of curvature decreasing in a direction of the angle from the view direction to the light directed by the first reflector lens to the second reflector lens.
    Type: Application
    Filed: August 12, 2011
    Publication date: November 7, 2013
    Inventors: Huibert Visser, Borgert Kruizinva, Michiel David Nijkerk
  • Patent number: 8237912
    Abstract: A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
    Type: Grant
    Filed: March 8, 2011
    Date of Patent: August 7, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard
  • Patent number: 8189173
    Abstract: Apparatus and methods are used to control a polarization state of a radiation beam. A polarization control unit is configured to modulate a polarization state of at least a part of a radiation beam. A determination arrangement is configured to subsequently determine the polarization state of the at least a part of the radiation beam. A feedback unit is configured to provide signals to the polarization control arrangement based on at least the determined polarization state in order to correct for deviation in the polarization state of the part of the radiation beam from a desired polarization state. For example, the correction may ensure that the polarization state of the part of the radiation beam is at, or returns to, the desired polarization state.
    Type: Grant
    Filed: January 12, 2009
    Date of Patent: May 29, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Marcel Henk André Janssens, Oscar Franciscus Jozephus Noordman, Huibert Visser, Evert Nieuwkoop
  • Patent number: 8164740
    Abstract: A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: April 24, 2012
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Rob Vink, Yevgeniy Shmarev
  • Patent number: 8159651
    Abstract: A coherence remover includes a first partially reflective surface and a second partially reflective surface. The coherence remover is configured to receive an input beam. Each of the first and second reflective surfaces is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
    Type: Grant
    Filed: December 4, 2008
    Date of Patent: April 17, 2012
    Assignees: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Huibert Visser, Jacob Fredrik Friso Klinkhamer, Lev Ryzhikov, Scott D. Coston, Adel Joobeur, Rob Vink, Yevgeniy Shmarev
  • Publication number: 20110194096
    Abstract: A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
    Type: Application
    Filed: March 8, 2011
    Publication date: August 11, 2011
    Applicant: ASML Netherlands B.V.
    Inventors: Herman BOOM, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard
  • Patent number: 7969549
    Abstract: A lens element, for use in a projection system, includes a concave side. The lens element further includes a membrane and a nozzle, the membrane at least covering the concave side of the lens element. The nozzle is arranged for supplying and/or removing a liquid and/or a gas in between the concave side and the membrane.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: June 28, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard
  • Patent number: 7948606
    Abstract: A system and method are used to form incoherent beams from at least a partially coherent beam, such that interference or speckle patterns are substantially eliminated. A rotating optical element directs the partially coherent beam to reflect from an angular distribution changing element to form an incoherent beam. The partially coherent beam can be directed at varying angles or positions onto the angular distribution changing element through rotation of the rotating optical element. The angles can vary as a function of time.
    Type: Grant
    Filed: April 13, 2006
    Date of Patent: May 24, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Huibert Visser, Johannes Jacobus Matheus Baselmans, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink