Abstract: A manufacturing method for contacts for a semiconductor device and a semiconductor device having said contacts, said method forms contact structures whose lower part consists of a plurality of contact holes and whose upper part consists of a trench contact, said contact holes having relatively smaller diameters, and the trench contacts having relatively larger contact areas. Thus contact holes with smaller diameters and trench contacts having larger contact areas can be easily connected to the metal layer above them, thereby improving the electrical conductivity of the contacts and improving the overall performances of the device.