Abstract: A high-acoustic-resistance piston motion loudspeaker disclosed in the present disclosure belongs to the field of sound-electricity conversion. The loudspeaker includes a substrate, a driving assembly, a vibrating diaphragm, a connecting assembly and a vibration cavity. The connecting assembly is not coplanar with the vibrating diaphragm, which is of a concealed connecting structure. The driving assembly is configured to drive the vibrating diaphragm to generate a piston motion. The vibrating diaphragm is located in the vibration cavity, and a displacement range of the vibrating diaphragm in a perpendicular direction is within a height range of the vibration cavity formed by a supporting structure extending in a thickness direction of a base, so as to achieve purposes of reducing air leakage and improving a sound pressure level in a working process of the loudspeaker.

Abstract: A color mixing light system comprises a pyramidal mirror assembly comprising three or more mirrors constructed and arranged in a pyramid structure and three or more color light sources. The pyramidal mirror assembly divides the light beams from the color light sources so that a first portion is reflected by the mirrors and a second portion extends beyond the mirrors to collectively form a multicolor pattern comprising plurality of overlapping color regions on a surface.

Abstract: Provided is a camera system to obtain high resolution imagery on multiple regions of interest even when the regions of interest are ate different focal depths and in different viewing directions. Embodiments include a high speed camera that operates by reflecting a beam of interest corresponding to a scene of interest into a high-speed passive sensor from a dynamic optical modulator. Embodiments described herein provide a foveating camera design that distributes resolution onto regions of interest by imaging reflections off a scanning micro-electromechanical system (MEMS) mirror. MEMS mirrors are used herein to modulate viewing direction. Embodiments include a camera capturing reflections off of a tiny, fast moving mirror.

Abstract: This application discloses a MEMS chip structure, including a substrate, a side wall, a dielectric plate, a MEMS micromirror array, and a grid array, where the MEMS micromirror array includes a plurality of grooves and a plurality of MEMS micromirrors. The plurality of MEMS micromirrors are in a one-to-one correspondence with the plurality of grooves. The grid array is located above the MEMS micromirror array, and a lower surface of the grid array is connected to upper surfaces of side walls of at least some of the plurality of grooves.

Abstract: A color mixing light system comprises a pyramidal mirror assembly comprising three or more mirrors constructed and arranged in a pyramid structure and three or more color light sources. The pyramidal mirror assembly divides the light beams from the color light sources so that a first portion is reflected by the mirrors and a second portion extends beyond the mirrors to collectively form a multicolor pattern comprising plurality of overlapping color regions on a surface.

Abstract: A color mixing light system comprises a pyramidal mirror assembly comprising three or more mirrors constructed and arranged in a pyramid structure and three or more color light sources. The pyramidal mirror assembly divides the light beams from the color light sources so that a first portion is reflected by the mirrors and a second portion extends beyond the mirrors to collectively form a multicolor pattern comprising plurality of overlapping color regions on a surface.

Abstract: Methods and apparatuses for enlarging the optical scan angle of imaging probes are provided. The optical scan angle of endoscopic probes can be increased by employing the “Snell's Window” effect. An endoscopic probe can include an endoscope shell, a device for capturing electromagnetic radiation, and a liquid or gel provided between the device for capturing electromagnetic radiation and the endoscope shell. The endoscope probe can further include a first mirror placed such that electromagnetic radiation entering through the endoscope shell can bounce off the first mirror and enter the device for capturing electromagnetic radiation. The first mirror can be a microelectromechanical systems (MEMS) mirror.

Abstract: A color mixing light system comprises a pyramidal mirror assembly comprising three or more mirrors constructed and arranged in a pyramid structure and three or more color light sources. The pyramidal mirror assembly divides the light beams from the color light sources so that a first portion is reflected by the mirrors and a second portion extends beyond the mirrors to collectively form a multicolor pattern comprising plurality of overlapping color regions on a surface.

Abstract: A color mixing light system comprises a pyramidal mirror assembly comprising three or more mirrors constructed and arranged in a pyramid structure and three or more color light sources. The pyramidal mirror assembly divides the light beams from the color light sources so that a first portion is reflected by the minors and a second portion extends beyond the minors to collectively form a multicolor pattern comprising plurality of overlapping color regions on a surface.

Abstract: Provided is a camera system to obtain high resolution imagery on multiple regions of interest even when the regions of interest are ate different focal depths and in different viewing directions. Embodiments include a high speed camera that operates by reflecting a beam of interest corresponding to a scene of interest into a high-speed passive sensor from a dynamic optical modulator. Embodiments described herein provide a foveating camera design that distributes resolution onto regions of interest by imaging reflections off a scanning micro-electromechanical system (MEMS) mirror. MEMS mirrors are used herein to modulate viewing direction. Embodiments include a camera capturing reflections off of a tiny, fast moving mirror.

Abstract: This application discloses a MEMS chip structure, including a substrate, a side wall, a dielectric plate, a MEMS micromirror array, and a grid array, where the MEMS micromirror array includes a plurality of grooves and a plurality of MEMS micromirrors. The plurality of MEMS micromirrors are in a one-to-one correspondence with the plurality of grooves. The grid array is located above the MEMS micromirror array, and a lower surface of the grid array is connected to upper surfaces of side walls of at least some of the plurality of grooves.

Abstract: Provided is a tracking light system that tracks one or more targets and provides an illumination region locally at the one or more targets, comprising: a tracking light module, comprising: a sensor module array comprising a plurality of sensor modules, each sensor module comprising at least one sensor; an light emitting diode (LED) module array comprising a plurality of LED modules; and a lens in front of the LED module array, wherein an LED of an LED module of the LED module array outputs a source of light directed at the lens and forming a projection spot on a surface of an area of interest, the at least one sensor forming a detection region that overlaps the projection spot for monitoring the projection spot. When an object is detected in the detection region, the LED is activated to output the source of light. When the object departs the detection region, the LED is turned off.

Abstract: Methods and apparatuses for enlarging the optical scan angle of imaging probes are provided. The optical scan angle of endoscopic probes can be increased by employing the “Snell's Window” effect. An endoscopic probe can include an endoscope shell, a means for capturing electromagnetic radiation, and a liquid or gel provided between the means for capturing electromagnetic radiation and the endoscope shell. The endoscope probe can further include a first mirror placed such that electromagnetic radiation entering through the endoscope shell can bounce off the first mirror and enter the means for capturing electromagnetic radiation. The first mirror can be a microelectromechanical systems (MEMS) mirror.

Abstract: A MEMS self-aligned high-and-low comb tooth and manufacturing method thereof, the comb tooth having a lifting structure, the lifting structure generating a displacement in the vertical direction to drive the movement of a movable comb tooth or a fixed comb tooth attached thereto. The manufacturing method thereof adopts a silicon wafer, the lifting structure and the comb tooth are sequentially formed on a mechanical structure layer, the fixed comb tooth and the movable comb tooth are formed with the same etching process, and the stress in the lifting structure displaces the fixed comb tooth and the movable comb tooth in the vertical direction, thus forming the self-aligned high-and-low comb tooth.

Abstract: A MEMS self-aligned high-and-low comb tooth and manufacturing method thereof, the comb tooth having a lifting structure, the lifting structure generating a displacement in the vertical direction to drive the movement of a movable comb tooth or a fixed comb tooth attached thereto. The manufacturing method thereof adopts a silicon wafer, the lifting structure and the comb tooth are sequentially formed on a mechanical structure layer, the fixed comb tooth and the movable comb tooth are formed with the same etching process, and the stress in the lifting structure displaces the fixed comb tooth and the movable comb tooth in the vertical direction, thus forming the self-aligned high-and-low comb tooth.

Abstract: Various methods and systems are provided for power inductors in silicon (PIiS) In one embodiment, a PIiS includes a magnetic core of magnetic material embedded in a silicon substrate, and a conductive winding having a plurality of turns, where adjacent turns of the conductive winding have a space therebetween, and where at least a portion of the magnetic core is encircled by the conductive winding In another embodiment, a DC to DC converter includes a PIiS, which includes a magnetic core of magnetic material embedded in a silicon substrate, a conductive winding having a plurality of turns, where at least a portion of the magnetic core is encircled by the conductive winding, and a cap layer of magnetic material disposed on at least one side of the silicon substrate The DC to DC converter also includes an integrated circuit mounted on the cap layer of the power inductor in silicon.

Abstract: A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first flexible bimorph beams, a plurality of second rigid frames, a plurality of second flexible bimorph beams, a platform, and a plurality of third flexible bimorph beams. Activation of the first, second, and third bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift.

Abstract: Embodiments of the subject invention relate to micromirror devices and methods of fabricating a micromirror/micromirror array. According to an embodiment, micromirrors can be fabricated from a semiconductor substrate where after forming actuators and bonding pads on a front side of the semiconductor substrate, the device is flipped over to have a portion of the back side of the substrate removed and formed to become the mirror plate surface. The subject micromirrors can allow further miniaturization of endoscopes and other optical applications without sacrificing the optical aperture through their surface mounting capabilities.

Abstract: Embodiments of the invention provide robust electrothermal MEMS with fast thermal response. In one embodiment, an electrothermal bimorph actuator is fabricated using aluminum as one bimorph layer and tungsten as the second bimorph layer. The heating element can be the aluminum or the tungsten, or a combination of aluminum and tungsten, thereby providing a resistive heater and reducing deposition steps. Polyimide can be used for thermal isolation of the bimorph actuator and the substrate. For MEMS micromirror designs, the polyimide can also be used for thermal isolation between the bimorph actuator and the micromirror.

Abstract: Embodiments of the invention integrate carbon nanotubes on a CMOS substrate using localized heating. An embodiment can allow the CMOS substrate to be in a room-temperature environment during the carbon nanotube growth process. Specific embodiments utilize a maskless post-CMOS microelectromechanical systems (MEMS) process. The post-CMOS MEMS process according to an embodiment of the present invention provides a carbon nanotube growth process that is foundry CMOS compatible. The maskless process, according to an embodiment, eliminates the need for photomasks after the CMOS fabrication and can preserve whatever feature sizes are available in the foundry CMOS process. Embodiments integrate single-walled carbon nanotube devices into a CMOS platform.