Abstract: In some examples, a device includes a substrate, an oxide layer, and a resonator structure. The substrate is configured in a released-resonator architecture. The substrate has a first surface that is a roughened first surface and a second surface opposite to the first surface. The second surface exposed to a cavity of the released-resonator architecture.

Abstract: Embodiments described herein provide systems and methods for acoustically driving spin rotations of diamond nitrogen-vacancy (NV) centers using acoustic transducers. The acoustic transducers may comprise devices such as bulk acoustic resonators or surface acoustic resonators. The systems and methods may allow driving of ms=0 to ms=?1, ms=0 to ms=+1, ms=?1 to ms=0, and ms=+1 to ms=0 single-quantum (SQ) spin transitions without the need to apply magnetic field pulses. This may substantially reduce the size and power requirements of NV center-based sensors. The systems and methods may be used to conduct a variety of measurements, such as measurements of magnetic field, electric field, orientation, strain, or temperature.

Abstract: An integrated circuit (IC) resonator module for an IC package includes an acoustic resonator having a surface and a Bragg reflector adhered to the surface of the acoustic resonator. The Bragg reflector includes low impedance layers formed of a first material with a first acoustic impedance and a high impedance layer formed of a second material with a second acoustic impedance. The second acoustic impedance is greater than the first acoustic impedance. The Bragg reflector further includes a Bragg grating layer formed of randomly or periodically spaced patches of the second material separated by vias filled with the first material.