Patents by Inventor Huizong Lu
Huizong Lu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6829419Abstract: A method of aligning fibers on a substrate includes placing a grooved substrate on a base next to an opening formed through a top surface of the base, flowing air through the opening to draw the plurality of fibers down towards the top surface of the substrate or base, placing a set of fibers to extend over the substrate or base and over the opening and bonding the plurality of fibers to the substrate.Type: GrantFiled: February 4, 2002Date of Patent: December 7, 2004Assignee: Zygo CorporationInventors: Robert Brown, Jeffrey E. Leclaire, Huizong Lu, John L. Sullivan
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Patent number: 6798970Abstract: An apparatus for placing a fiber on a substrate, the apparatus including a base, a supporting member attached to the base, a first placement head attached to the support member, the first placement head having an extendable plunger slidably coupled to the first placement head, the first placement head having an airflow channel formed proximate to a tip of the plunger, a substrate carrier attached to the base, wherein, during operation of the apparatus, the substrate carrier holds a substrate beneath the plunger mechanism, and wherein, during operation of the apparatus, a vacuum source is connected to the placement head to draw a flow of air through the airflow channel, and wherein, during operation of the apparatus, the placement head picks up and holds a fiber against the plunger tip using forces associated with the flow of air.Type: GrantFiled: February 26, 2002Date of Patent: September 28, 2004Assignee: Zygo CorporationInventors: Robert Brown, Jeffrey E. Leclaire, Huizong Lu, John L. Sullivan
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Patent number: 6754428Abstract: An apparatus includes a substrate having at least one opening through a top surface to a bottom surface, the substrate also having a first plurality of aligned grooves formed in the top surface and a plurality of fibers, where each of the plurality of fibers are positioned over the opening and in contact with the substrate within a corresponding one of the first plurality of grooves. In another aspect, a method of manipulating fibers includes placing a plurality of fibers on a substrate to extend over an opening formed through a top surface of the substrate to a bottom surface of the substrate, and flowing air through the opening to draw the plurality of fibers down towards the top surface of the substrate, and positioning each of said plurality of fibers in substantial alignment.Type: GrantFiled: March 14, 2002Date of Patent: June 22, 2004Assignee: Zygo CorporationInventors: Robert Brown, Jeffrey E. LeClaire, Huizong Lu, John L. Sullivan
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Patent number: 6616346Abstract: An apparatus for aligning a fiber to an optical device includes a base, a fiber holder mounted on the base, the fiber holder holding the fiber during operation of the apparatus, a first movable stage mounted on the base, the first movable stage holding the optical device during operation of the apparatus, a second movable stage mounted on the base, wherein the second movable stage is configured to move parallel to the first movable stage, a fiber positioner attached to the second movable stage, and a processor programmed to control the movement of the first movable stage and the second movable stage, wherein, during operation of the apparatus, the processor moves the first movable stage and the second movable stage towards the fiber.Type: GrantFiled: August 10, 2001Date of Patent: September 9, 2003Assignee: Zygo CorporationInventors: Robert E. Brown, Jeffrey E. Leclaire, John L. Sullivan, Huizong Lu
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Patent number: 5951891Abstract: A disk texturing tool is used, for example, to provide textured spots in an annular portion of both sides of a hardfile disk. An optical system includes a laser directed at a beamsplitter to split the laser beam into two beams having approximately equal power, which are directed along parallel paths through a power control optics block to expose simultaneously opposite sides of a disk to be textured. A visible laser beam is also directed along this optical system to an inspection spot on each side of the disk, by which a central portion of each textured spots passes. A beam angle detector detects deflection of a reflection of the inspection beam from this spot in the direction of motion of the disk at this spot. This deflection provides a measure of the topography of the spot.Type: GrantFiled: March 24, 1997Date of Patent: September 14, 1999Assignee: International Business Machines CorporationInventors: Michael Barenboim, Peter Michael Baumgart, Pieter J. M. Kerstens, Huizong Lu, Iraj Kahkesh Pour, Eric Von Schnetzer, Hong S. Seing, Andrew Ching Tam
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Patent number: 5929983Abstract: A device is provided for determining the height and/or tilt of local features on the surface of a sample. The device includes a laser projecting a collimated beam at an oblique angle at a reflection point on the sample surface and a converging lens having an optical axis extending at an angle of reflection equal to the angle of incidence from the reflection point. The focusing characteristics of the lens are used to separate the deflection of the reflected collimated beam due to tilt of the surface from such deflection due to linear displacement of the surface.Type: GrantFiled: October 29, 1997Date of Patent: July 27, 1999Assignee: International Business Machines CorporationInventor: Huizong Lu
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Patent number: 5926266Abstract: Apparatus for inspecting the surface of a sample includes a wide scanning interferometer, which is used to locate defects, or anomalies in the surface, and a narrow scanning interferometer, which is used to develop profiles of individual defects found by the narrow scanning interferometer. The sample may be driven in rotation about an axis, while the interferometers are independently moved radially to the axis.Type: GrantFiled: September 23, 1996Date of Patent: July 20, 1999Assignee: International Business Machines CorporationInventors: Alan D. Dorundo, Michael Gerard Lisanke, Huizong Lu, Richard J. McCormick, Lanphuong Thi Pena, Eric V. Schnetzer, Ali Reza Taheri
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Patent number: 5877858Abstract: Optical apparatus is provided for inspecting a textured surface measures a level of scattered reflections from the surface, occurring when an inspection laser beam is directed at the surface. In a first version of the apparatus, the intensity of scattered reflections directed at a single light-sensitive element are compared with the intensity of specular reflections directed at another light-sensitive element. In a second version, diffraction rings formed by the scattered reflections are passed through a mask which attenuates their intensity according to differences between the actual diffraction rings and a predetermined diffraction pattern. In a third version, the scattered light is divided by a beamsplitter to pass through one mask which increases attenuation as the diffraction rings are increased in size compared to a predetermined diffraction pattern or through another mask which decreases attenuation as the diffraction rings are decreased in size compared to the predetermined diffraction pattern.Type: GrantFiled: September 19, 1997Date of Patent: March 2, 1999Assignee: International Business Machines CorporationInventors: Pieter J. M. Kerstens, Huizong Lu, Hee Kuwon Park
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Patent number: 5822211Abstract: A disk texturing process uses a single pulsed laser to texture disks within a first group, which are carried through the texturing process on a first spindle assembly, and from a second group, which are carried through the texturing process on a second spindle assembly. Preferably, disks from the first group are textured alternately with disks in the second group. A first level of least one texturing parameter is stored for use only as the process is applied to disks from the first group, while a second level of the same texturing parameter is stored for use only as the process is applied to disks from the second group. These levels may be derived from measurements of textured spots made with interferometric devices forming portions of a texturing station.Type: GrantFiled: November 13, 1996Date of Patent: October 13, 1998Assignee: International Business Machines CorporationInventors: Michael Barenboim, Peter Michael Baumgart, Peter P. Chrusch, Benny Michael Harper, Benjamin Kami, Pieter J. M. Kerstens, Michael Gerard Lisanke, Huizong Lu, Lanphuong Thi Pena, Eric V. Schnetzer, Hong S. Seing, Ali Reza Taheri, Andrew Ching Tam
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Patent number: 5784163Abstract: An interferometer forms a pair of projected sub-beams by decomposing a single coherent, linearly-polarized beam. These sub-beams are focussed by an objective lens onto a pair of test spots on a test surface. The reflections of these sub-beams are recombined to form an elliptically polarized return beam, which is broken into return sub-beams of opposing polarities in a polarizing beam splitter. The intensities of these return sub-beams are used to calculate a difference in height between the two test spots. When these test spots are aligned along a path of relative motion with the test surface, the resulting differences in height are added to form an accumulative profile of the test surface.Type: GrantFiled: September 23, 1996Date of Patent: July 21, 1998Assignee: International Business Machines CorporationInventors: Huizong Lu, Ali Reza Taheri
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Patent number: 5710631Abstract: An interferometer is used to locate and examine defects in a test surface of a test specimen. Defects are first located as the test surface is driven past the objective of the interferometer at a constant speed, with a darkfield interferogram being examined as it flows across a row of CCD elements. During this process, the location of each defect is stored. Next, the test specimen is sequentially moved into the locations at which static measurements are made using an area array of CCD elements. During these measurements, the phase angle relationship of the interferometer is varied so that heights of surface segments may be calculated. If some to these segments are located more than a quarter wave length of the interferometer light source from the surface at which the darkfield is established, a process is used to perform height corrections for segments within transition boundaries.Type: GrantFiled: January 27, 1997Date of Patent: January 20, 1998Assignee: International Business Machines CorporationInventors: Akram Aref Bou-Ghannam, Alan David Dorundo, Michael Gerard Lisanke, Huizong Lu, Lanphuong Thi Pena, Ali Reza Taheri, Samuel Sheung-Lok So, Kenneth Wayne Watts, Darell Smith Whitaker
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Patent number: 5703684Abstract: A glide height tester for inspecting a surface of a spinning magnetic disk includes a glide plate, which is mounted to pivot above the disk surface. A reflective surface fastened to the glide plate is imaged by interferometric apparatus which produces a calculated output indicating a first angle of the glide plate. The interferometric apparatus includes a Wollaston prism, which can be rotated 90-degrees to provide an output indicating a second angle of the glide plate, perpendicular to the first angle.Type: GrantFiled: September 23, 1996Date of Patent: December 30, 1997Assignee: International Business Machines CorporationInventors: Huizong Lu, Ali Reza Taheri
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Patent number: 5699160Abstract: Inspection apparatus for determining the profile of textured spots extending in a pattern along a surface of a magnetic disk includes an interferometer which illuminates first and second, adjacently disposed test spots on the surface. The disk and the interferometer are moved, relative to one another, so that one of the test spots traverses the textured spots in the pattern while the other test spot is moved along a flat portion of the disk surface. In one embodiment, the inspection apparatus is built into the device forming the textured spots, providing feedback controlling the texturing process.Type: GrantFiled: September 23, 1996Date of Patent: December 16, 1997Assignee: International Business Machines CorporationInventors: Michael Barenboim, Peter Michael Baumgart, Peter P. Chrusch, Benny Michael Harper, Benjamin Karni, Pieter J. M. Kerstens, Michael Gerard Lisanke, Hong S. Seing, Huizong Lu, Lanphuong Thi Pena, Ali Reza Taheri, Andrew Ching Tam