Abstract: Beam distributing/shaping units 21a and 21b the number of which is the same as the number of heads 7a and 7b are disposed in series with each other on an optical path of a laser beam 2 radiated from a laser oscillator 1. Then, the beam distributing/shaping units 21a and 21b are operated so that a laser pulse is supplied to one of the heads which has been positioned. By selecting the timing for operating the beam distributing/shaping units 21a and 21b, the laser beam 2 having energy the magnitude of which is substantially fixed is supplied to a portion to be machined. Thus, the laser oscillator is used effectively, and the machining energy is controlled accurately so that a high-quality hole can be machined.

Abstract: A vacuum evaporator is characterized in that hot-cathode filaments (7) are provided as the electron source around a tip of a rod evaporation material (4); the peripheries of the rod evaporation material (4) and the hot-cathode filaments (7) are disposed in parallel to a conductive cooling member (1) of a good heat conductive metal which is partly contacted with the atmosphere to decrease the dissipation of radiation heat produced from the hot-cathode filaments (7) and a tip (41) of the rod evaporation material (4) into a vacuum vessel a; heat absorbed by the conductive cooling member (1) is quickly conducted through the conductive cooling member and discharged to the atmosphere to prevent the temperature of the electron impact heating part from increasing and to prevent the increase of the gas discharge due to the heat dissipation from the electron impact heating part.