Abstract: A cylindrical secondary battery includes a first gasket and a second gasket having a modified shape to secure hermetic sealability and insulation. The battery includes a cylindrical can for receiving an electrode assembly, a cap assembly located at the upper part of the cylindrical can, a first gasket for covering outer circumferential edges of a top cap and a venting member of the cap assembly, a current interrupt device (CID) located at the lower part of the cap assembly, and a second gasket along the outer circumferential edge of the current interrupt device. An upper end portion of the first gasket covers the upper surface of the outer circumferential edge of the top cap, and includes a recessed portion in its inner surface configured to prevent the first gasket from being brought into tight contact with the upper surface of the outer circumferential edge of the top cap.

Abstract: A battery module includes a plurality of battery cells assemblies, each having a plurality of battery cells stacked on each other; and at least one cooling unit provided between the plurality of battery cells assemblies and filled with a predetermined coolant therein, the at least one cooling unit having at least one membrane member provided at one end thereof to be opened or closed according to a change of an internal pressure thereof.

Abstract: A battery module includes a plurality of battery cells assemblies, each having a plurality of battery cells stacked on each other; and at least one cooling unit provided between the plurality of battery cells assemblies and filled with a predetermined coolant therein, the at least one cooling unit having at least one membrane member provided at one end thereof to be opened or closed according to a change of an internal pressure thereof.

Abstract: A cylindrical secondary battery includes a first gasket and a second gasket having a modified shape to secure hermetic sealability and insulation. The battery includes a cylindrical can for receiving an electrode assembly, a cap assembly located at the upper part of the cylindrical can, a first gasket for covering outer circumferential edges of a top cap and a venting member of the cap assembly, a current interrupt device (CID) located at the lower part of the cap assembly, and a second gasket along the outer circumferential edge of the current interrupt device. An upper end portion of the first gasket covers the upper surface of the outer circumferential edge of the top cap, and includes a recessed portion in its inner surface configured to prevent the first gasket from being brought into tight contact with the upper surface of the outer circumferential edge of the top cap.

Abstract: Disclosed is a cooling jacket configured to be disposed close to one surface of a battery cell to absorb heat of the battery cell, the cooling jacket including a cooling plate and a plurality of cooling channels extending therein. The plurality of cooling channels include a coolant supply manifold channel and a coolant discharge manifold channel respectively disposed at first and second sides of the cooling plate and each extending in a longitudinal direction from an inside of the cooling plate to an outside of the cooling plate so that one end thereof is exposed to the outside of the cooling plate; and non-uniform cooling channels spaced apart from each other by a predetermined distance and each having first and second ends respectively connected to the coolant supply manifold channel and the coolant discharge manifold channel, the non-uniform cooling channels having widths that are non-uniform in the longitudinal direction.

Abstract: A battery module including a battery-cooling heat sink having a PCM capsule. The battery-cooling heat sink provides a uniform temperature of a cooling fluid flowing through the battery module using a PCM capsule, minimizes a temperature variation of the cooling fluid over the entire area of the heat sink formed in the battery module, and prevents the temperature at a cooling fluid outlet of the heat sink from being higher than that of a cooling fluid inlet.

Abstract: Disclosed is a battery module, which includes a battery cell assembly including a plurality of battery cells stacked on each other along a vertical direction, a heatsink configured to cover one side of the battery cell assembly, and a pair of cooling plates connected to the heatsink to cover both side surfaces of the battery cell assembly, respectively, the pair of cooling plates having a coolant channel formed along a stacking direction of the plurality of battery cells.

Abstract: Disclosed is a cooling jacket configured to be disposed close to one surface of a battery cell to absorb heat of the battery cell, the cooling jacket including a cooling plate and a plurality of cooling channels extending therein. The plurality of cooling channels include a coolant supply manifold channel and a coolant discharge manifold channel respectively disposed at first and second sides of the cooling plate and each extending in a longitudinal direction from an inside of the cooling plate to an outside of the cooling plate so that one end thereof is exposed to the outside of the cooling plate; and non-uniform cooling channels spaced apart from each other by a predetermined distance and each having first and second ends respectively connected to the coolant supply manifold channel and the coolant discharge manifold channel, the non-uniform cooling channels having widths that are non-uniform in the longitudinal direction.

Abstract: A battery module including a battery-cooling heat sink having a PCM capsule. The battery-cooling heat sink provides a uniform temperature of a cooling fluid flowing through the battery module using a PCM capsule, minimizes a temperature variation of the cooling fluid over the entire area of the heat sink formed in the battery module, and prevents the temperature at a cooling fluid outlet of the heat sink from being higher than that of a cooling fluid inlet.

Abstract: Disclosed is a battery module, which includes a battery cell assembly including a plurality of battery cells stacked on each other along a vertical direction, a heatsink configured to cover one side of the battery cell assembly, and a pair of cooling plates connected to the heatsink to cover both side surfaces of the battery cell assembly, respectively, the pair of cooling plates having a coolant channel formed along a stacking direction of the plurality of battery cells.

Abstract: A water meter of the present invention may accurately measure a flow rate and reduce power consumption. The water meter includes a body including an inlet unit and an outlet unit, an impeller unit provided to rotate due to a fluid flowing in the body, a cover member that covers one side of the impeller unit and includes a guide groove formed therein, and sensors that are provided on one side and the other side of the cover member and are spaced apart from each other to face each other. The impeller unit includes blades interfering with the fluid, a shaft forming a rotational center of the blades, and a cut-off unit that extends from one side of the plurality of blades to be inserted into the guide groove, and selectively cuts off signal transmission between the plurality of sensors.

Abstract: A water meter of the present invention may accurately measure a flow rate and reduce power consumption. The water meter includes a body including an inlet unit and an outlet unit, an impeller unit provided to rotate due to a fluid flowing in the body, a cover member that covers one side of the impeller unit and includes a guide groove formed therein, and sensors that are provided on one side and the other side of the cover member and are spaced apart from each other to face each other. The impeller unit includes blades interfering with the fluid, a shaft forming a rotational center of the blades, and a cut-off unit that extends from one side of the plurality of blades to be inserted into the guide groove, and selectively cuts off signal transmission between the plurality of sensors.

Abstract: An inductive-coupled plasma apparatus employs a shield to reduce sputter contamination. A method for manufacturing the shield is included. An apparatus for generating a high-density plasma includes a process chamber having a dielectric window located along a plane, a coil located outside the process chamber proximate to the dielectric window and substantially parallel to the plane, and a shield located between the coil and the dielectric window. The shield has multiple openings, wherein the multiple openings of the shield are disposed at locations corresponding to areas between the turns of the coil.

Abstract: A retainer ring of a polishing head of a CMP apparatus facilitates the removal of contaminants, such as slurry debris, which have found their way into the polishing head. The retainer ring includes an annular ring body, and a plurality of contaminant outlets extending from the inner peripheral surface of the ring body to the outer peripheral surface of the ring body. Inner openings defined at the inner peripheral surface of the ring body and outer openings defined at the outer peripheral surface of the ring body by the contaminant outlets are horizontally elongated slots. Also, each of the contaminant outlets consists of a plurality of inner holes and an outer hole which is joined to the plurality of inner holes. The contaminant outlets occupy at least 30% of the radially innermost peripheral surface along a line extending circumferentially along the surface.

Abstract: An inductive-coupled plasma apparatus employs a shield to reduce sputter contamination. A method for manufacturing the shield is included. An apparatus for generating a high-density plasma includes a process chamber having a dielectric window located along a plane, a coil located outside the process chamber proximate to the dielectric window and substantially parallel to the plane, and a shield located between the coil and the dielectric window. The shield has multiple openings, wherein the multiple openings of the shield are disposed at locations corresponding to areas between the turns of the coil.

Abstract: A semiconductor manufacturing system includes a loadlock chamber, a low level vacuum pump connected to said loadlock chamber so as to create a low level vacuum in the loadlock chamber, a processing chamber in which a semiconductor manufacturing process is carried out while the processing chamber is maintained at a high level vacuum, a gate valve interposed between and connecting the loadlock chamber and the processing chamber, and a pressure relieving device for reducing the pressure difference between the low level vacuum of the loadlock chamber and the high level vacuum of the processing chamber at the time the gate valve is opened. The pressure relieving device is a high level vacuum pump which can be dedicated to the loadlock chamber or which can be the same pump as that used to evacuate the processing chamber. The high level vacuum pump is connected to the loadlock chamber by an air valve.

Abstract: There is provided a method of etching metallic film for a semiconductor device, in which a semiconductor substrate with a metallic film exposed in a film pattern is inserted onto a chuck in a chamber of an electrostatic shielded radio frequency (ESRF) inductive-coupled plasma source, the ESRF inductive-coupled plasma source also including a coil connected to an upper electrode, a lower electrode connected to the chuck, a gas supply assembly, a pressure control assembly and a temperature control assembly. An etching gas is supplied to the chamber at a predetermined etch gas supply rate. Pressure inside the chamber is maintained at a predetermined pressure level. The upper and lower electrodes are powered with predetermined upper and lower powers, respectively, at predetermined upper and lower RFs, respectively. The chamber walls are cooled to a predetermined temperature.

Abstract: A UV irradiation apparatus, which includes a UV lamp installed in a chamber for generating UV rays; a vacuum chuck installed below the UV lamp for supporting and moving a wafer; and, a reflector surrounding the UV lamp for concentrating UV rays on the vacuum chuck. The apparatus further includes heating blocks for controlling the temperature at both sides of the vacuum chuck. Thus, it is possible to maintain an essentially constant temperature around the wafer supported by the vacuum chuck. As a result of the temperature control, when a protection tape attached to the front side of the wafer is irradiated with UV rays, an adhesive of the protective tape can be effectively degraded by a chemically reaction under optimum conditions, to thereby easily detach the protection tape from the wafer.