Patents by Inventor Hung-Chi Wu

Hung-Chi Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230343648
    Abstract: An improved work function layer and a method of forming the same are disclosed. In an embodiment, the method includes forming a semiconductor fin extending from a substrate; depositing a dielectric layer over the semiconductor fin; depositing a first work function layer over the dielectric layer; and exposing the first work function layer to a metastable plasma of a first reaction gas, a metastable plasma of a generation gas, and a metastable plasma of a second reaction gas, the first reaction gas being different from the second reaction gas.
    Type: Application
    Filed: June 30, 2023
    Publication date: October 26, 2023
    Inventors: Shao-Jyun Wu, Hung-Chi Wu, Chia-Ching Lee, Pin-Hsuan Yeh, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Sheng-Liang Pan, Huan-Just Lin
  • Patent number: 11735481
    Abstract: An improved work function layer and a method of forming the same are disclosed. In an embodiment, the method includes forming a semiconductor fin extending from a substrate; depositing a dielectric layer over the semiconductor fin; depositing a first work function layer over the dielectric layer; and exposing the first work function layer to a metastable plasma of a first reaction gas, a metastable plasma of a generation gas, and a metastable plasma of a second reaction gas, the first reaction gas being different from the second reaction gas.
    Type: Grant
    Filed: August 2, 2021
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shao-Jyun Wu, Hung-Chi Wu, Chia-Ching Lee, Pin-Hsuan Yeh, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Sheng-Liang Pan, Huan-Just Lin
  • Publication number: 20210358811
    Abstract: An improved work function layer and a method of forming the same are disclosed. In an embodiment, the method includes forming a semiconductor fin extending from a substrate; depositing a dielectric layer over the semiconductor fin; depositing a first work function layer over the dielectric layer; and exposing the first work function layer to a metastable plasma of a first reaction gas, a metastable plasma of a generation gas, and a metastable plasma of a second reaction gas, the first reaction gas being different from the second reaction gas.
    Type: Application
    Filed: August 2, 2021
    Publication date: November 18, 2021
    Inventors: Shao-Jyun Wu, Hung-Chi Wu, Chia-Ching Lee, Pin-Hsuan Yeh, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Sheng-Liang Pan, Huan-Just Lin
  • Patent number: 11081396
    Abstract: An improved work function layer and a method of forming the same are disclosed. In an embodiment, the method includes forming a semiconductor fin extending from a substrate; depositing a dielectric layer over the semiconductor fin; depositing a first work function layer over the dielectric layer; and exposing the first work function layer to a metastable plasma of a first reaction gas, a metastable plasma of a generation gas, and a metastable plasma of a second reaction gas, the first reaction gas being different from the second reaction gas.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: August 3, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shao-Jyun Wu, Hung-Chi Wu, Chia-Ching Lee, Pin-Hsuan Yeh, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Sheng-Liang Pan, Huan-Just Lin
  • Publication number: 20210082768
    Abstract: An improved work function layer and a method of forming the same are disclosed. In an embodiment, the method includes forming a semiconductor fin extending from a substrate; depositing a dielectric layer over the semiconductor fin; depositing a first work function layer over the dielectric layer; and exposing the first work function layer to a metastable plasma of a first reaction gas, a metastable plasma of a generation gas, and a metastable plasma of a second reaction gas, the first reaction gas being different from the second reaction gas.
    Type: Application
    Filed: September 12, 2019
    Publication date: March 18, 2021
    Inventors: Shao-Jyun Wu, Hung-Chi Wu, Chia-Ching Lee, Pin-Hsuan Yeh, Hung-Chin Chung, Hsien-Ming Lee, Chien-Hao Chen, Sheng-Liang Pan, Huan-Just Lin
  • Patent number: 9625822
    Abstract: Embodiments of performing a photolithography process are provided. The method for performing the photolithography process includes providing a substrate and forming a photoresist layer over the substrate. The method further includes forming exposed photoresist portions by performing an exposure process on the photoresist layer. The method further includes performing a surface modifying treatment on the photoresist layer after the exposure process and removing the exposed photoresist portions by performing a developing process.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: April 18, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Cheng Tsai, Hung-Chi Wu, Tsung-Chuan Lee, Chung-Hsien Lin
  • Publication number: 20150116679
    Abstract: Embodiments of performing a photolithography process are provided. The method for performing the photolithography process includes providing a substrate and forming a photoresist layer over the substrate. The method further includes forming exposed photoresist portions by performing an exposure process on the photoresist layer. The method further includes performing a surface modifying treatment on the photoresist layer after the exposure process and removing the exposed photoresist portions by performing a developing process.
    Type: Application
    Filed: October 30, 2013
    Publication date: April 30, 2015
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chi-Cheng TSAI, Hung-Chi WU, Tsung-Chuan LEE, Chung-Hsien LIN
  • Publication number: 20070157187
    Abstract: A process of automatically translating an extended activity diagram (EAD) into a hardware component graph (HCG).
    Type: Application
    Filed: June 21, 2006
    Publication date: July 5, 2007
    Applicant: Tatung Company
    Inventors: Fu-Chiung Cheng, Shin-Hway Yu, Kuan-Yu Chen, Jian-Yi Chen, Ming-Shiou Chiang, Shu-Ming Chang, Hung-Chi Wu, Ping-Yun Wang
  • Publication number: 20070157132
    Abstract: A process of automatically translating a high level programming language into a hardware description language (HDL), which can use a three-stage translation mechanism to generate the HDL codes corresponding to the functions described by the high level programming language. The first stage translates source codes coded by the high level programming language into an extended activity diagram (EAD). The second stage translates the EAD into a hardware component graph (HCG). The third stage generates the respective signal connections of HDL components according to all edges of the HCG, and outputs an HDL entity and architecture to a file in a string form, thereby completing the entire translation.
    Type: Application
    Filed: June 22, 2006
    Publication date: July 5, 2007
    Applicant: Tatung Company
    Inventors: Fu-Chiung Cheng, Jian-Yi Chen, Kuan-Yu Yan, Shin-Hway Yu, Kuan-Yu Chen, Chieh-Ju Wang, Shu-Ming Chang, Ping-Yun Wang, Li-Kai Chang, Chin-Tai Chou, Chi-Huam Shieh, Ming-Shiou Chiang, Nian-Zhi Huang, Hung-Chi Wu
  • Publication number: 20030201698
    Abstract: A storage cabinet comprised of an upper cover, a frame, a base, a back mirror, and a rear panel. The frame is fabricated of steel tubing (hollow metal tubes) and active hinges are installed on the frame to provide for its folding, thereby simplifying packaging material cost. Slide slots are formed along the top edges of lateral frame members that provide for the installation and positioning of the back mirror and the rear panel. The overall design of the present invention reduces components to a bare minimum and is safe, convenient, facilitates DIY assembly, and lowers import and export shipping costs.
    Type: Application
    Filed: April 25, 2002
    Publication date: October 30, 2003
    Inventors: Yi-Yi Liang, Hung-Chi Wu, Kuan-Chieh Yu
  • Patent number: 5096024
    Abstract: This invention relates to an adjustable magnetic brake and in particular to one including an aluminum fan, a magnetic conducting ring enclosing the aluminum fan, a permanent magnet disposed within the aluminum fan, a fixing seat for keeping the permanent magnet in position, a sliding seat mounted in the fixing seat and provided with a bearing, a housing, bolts provided on one side of the fixing seat and extending out of the housing, a mounting plate connected with the bolts and a wire connected with the mounting plate such that when the wire is pulled outwards, the permanent magnet will be moved outwards.
    Type: Grant
    Filed: August 10, 1990
    Date of Patent: March 17, 1992
    Inventor: Hung-Chi Wu