Abstract: A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate and is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate stacked on each other. A synchronously-deformed structure is defined by the flexible plate and the communication plate. The deformable substrate is bent in the direction toward the vibration plate. There is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of the vibration plate.

Abstract: An actuating and sensing module includes a first substrate, a second substrate, an actuating device and a sensor. A gas flow channel is formed by stacking the first substrate and the second substrate. The gas inlet, the gas flow channel and the gas outlet are in communication with each other to define a gas flow loop. The actuating device is disposed in the gas inlet of the second substrate and electrically connected to a control circuit to obtain a driving power. The sensor is disposed in the gas flow loop and electrically connected to a control circuit of the first substrate to transmit sensed data. While the actuating device drives outside gas from the outside, the gas is transported into the gas flow loop and sensed by the sensor.

Abstract: A micro pump includes a base plate, a valve membrane, an upper covering plate and a pump core module. The valve membrane is disposed in a valve membrane accommodation slot of the base plate, seals a fluid channel of the base plate and includes a valve aperture where a protruding portion of the base plate extended through. The upper covering plate is accommodated in an upper covering plate accommodation slot of the base plate and includes a fluid relief aperture sealed by the valve membrane, a fluid converging groove and a fluid converging channel between the fluid converging groove and a fluid-outlet channel of the base plate. The pump core module is accommodated within a pump accommodation slot of the base plate. By actuating the pump core module, the fluid passes through the fluid channel, the valve aperture, the fluid converging groove, and is discharged out through the fluid-outlet channel.

Abstract: A micro pump is disclosed and includes a fluid-converging plate, a valve membrane, a fluid-outlet plate and a pump core module. The fluid-converging plate includes an inner recess, a protruding portion and a fluid-converging aperture. The protruding portion is disposed at a center of the inner recess. The valve membrane includes a valve aperture. The protruding portion of the fluid-converging plate abuts against the valve aperture. A fluid-converging chamber is formed between the valve membrane and the fluid-converging plate. The fluid-outlet plate in a ring shape includes a fluid-outlet channel. The valve aperture is in fluid communication with the fluid-outlet channel. When the fluid is inhaled into the pump core module, the fluid flows to the fluid-converging chamber through the fluid-converging aperture and then pushes out the valve membrane to flow into the fluid-outlet channel of the fluid-outlet plate through the valve aperture. Thereby the fluid transportation is achieved.

Abstract: A gas transportation device includes a gas outlet cover, plural flow-guiding pedestals and plural gas pumps. The gas outlet cover includes a gas outlet nozzle and a gas outlet cavity. The gas outlet nozzle and the gas outlet cavity are in communication with each other. Each flow-guiding pedestal includes a main plate, a protruding frame and a chamber frame. The main plate includes a recess and a communicating aperture in communication with the recess. The gas pumps are disposed inside the chamber frames of the flow-guiding pedestals, respectively. The gas outlet cover covers the flow-guiding pedestals and is connected to the protruding frames, whereby plural convergence chambers are defined and are in communication with the gas outlet cavity. Consequently, the gas is transported through the recesses, the communicating apertures, the convergence chambers and the gas outlet cavity sequentially, and finally is discharged out from the gas outlet nozzle.

Abstract: A miniature gas control device is disclosed and includes a miniature gas transportation device and a miniature valve device. The miniature gas transportation device includes a protective film, a gas inlet plate, a resonance plate and a piezoelectric actuator stack sequentially. The miniature valve device includes a gas collecting plate, a valve film and a gas outlet plate stacked sequentially. By driving the piezoelectric actuator of the miniature gas transportation device, the gas flows into the miniature gas transportation device from the gas inlet plate, then the gas flows into the miniature valve device through the resonance plate, and the valve opening of the valve film is selectively opened or closed in response to a direction of the gas unidirectionally flowing among the perforations and chambers of the gas collection plate and the gas outlet plate, so as to perform a pressurizing operation and a pressure-releasing operation selectively.

Abstract: A gas transportation device includes a gas outlet cover, at least one flow-guiding pedestal, a primary gas pump, a secondary gas pump and an adhesive film. The gas outlet cover includes a gas outlet nozzle and a gas outlet cavity. Each flow-guiding pedestal includes a main plate, a protruding frame and a chamber frame. The main plate includes a recess and a communicating aperture. The primary gas pump is disposed in the protruding frame, and the secondary gas pump is disposed in the chamber frame. The adhesive film has a hollow structure, is disposed between the primary gas pump and the flow-guiding pedestal and defines a convergence chamber. Consequently, the gas is introduced into the recess, transported to the primary gas pump through the communicating apertures and the convergence chamber, transported to the gas outlet cavity via the primary gas pump, and finally discharged out from the gas outlet nozzle.

Abstract: A miniature fluid control device for transporting gas is disclosed, which includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate stacked on each other. The gas inlet plate includes at least one inlet, at least one convergence channel and a circular cavity which forms a convergence chamber. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric plate, wherein the suspension plate has a cylindrical bulge aligned with the circular cavity. The ratio of a second diameter of the cylindrical bulge to a first diameter of the circular cavity is set in a specified range to optimize the gas pressure of the transported gas, thus assuring efficiency of gas transmission of the miniature fluid control device.

Abstract: A miniature fluid control device includes a piezoelectric actuator, a gas collecting plate and a base. The piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square plate. The outer frame is arranged around the suspension plate. A surface of the outer frame and a surface of the suspension plate are coplanar with each other. The gas collecting plate is a frame body with an accommodation space. The base includes a gas inlet plate and a resonance plate. The base is disposed within the accommodation space to seal the piezoelectric actuator. An adhesive layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonance plate. Consequently, a depth of a compressible chamber between the piezoelectric actuator and the resonance plate is maintained.

Abstract: A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.

Abstract: A fluid transportation device includes a valve body, a valve membrane, a valve chamber seat, an actuator and an outer sleeve. The valve body includes an inlet passage and an outlet passage. The valve chamber seat includes an inlet valve channel, an outlet valve channel and a pressure chamber. The pressure chamber is in communication with the inlet valve channel and the outlet valve channel. The valve membrane is arranged between the valve body and the valve chamber seat. The valve membrane includes two valve plates. The inlet valve channel and the outlet valve channel are closed by the two valve plates. The pressure chamber is covered by the actuator. The outer sleeve has an accommodation space. A ring-shaped protrusion structure is formed on the inner wall of the outer sleeve. Moreover, plural engaging structures are discretely arranged on a periphery of the outer sleeve.

Abstract: A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.

Abstract: A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.

Abstract: A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

Abstract: A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.

Abstract: A piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square structure. The length of the suspension plate is in a range between 7.5 mm and 12 mm, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The outer frame is arranged around the suspension plate. The at least one bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate. The piezoelectric ceramic plate is a square structure and has a length not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration.

Abstract: A piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square structure. The length of the suspension plate is in a range between 4 mm and 8 mm, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The outer frame is arranged around the suspension plate. The at least one bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate. The piezoelectric ceramic plate is a square structure and has a length not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration.

Abstract: A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.