Abstract: A semiconductor device includes a substrate, a routing structure, a device layer and a bonding layer. The routing structure is disposed over the substrate, and includes a plurality of dielectric layer and a plurality of conductive features. The device layer is disposed over the routing structure. The bonding layer is disposed between the substrate and the routing structure, wherein the bonding layer includes a plurality of microchannels.

Abstract: The present disclosure provides an integrated circuit (IC) structure that includes a first substrate with a first surface having a normal direction along a first direction; a first IC chip bonded to the first substrate; and a second IC chip electrically connected to the first IC chip. The first and second IC chips are sealed in a same package having a sealing material layer, and the sealing material layer includes a first anisotropic thermal dissipation material. The first anisotropic thermal dissipation material is thermally conductive with a first thermal conductivity along the first direction and a second thermal conductivity along a second direction being perpendicular to the first direction. The second thermal conductivity is substantially greater than the first thermal conductivity.

Abstract: A method includes forming a fin structure over a bottom dielectric isolator and a substrate. The fin structure includes a bottom channel layer, a sacrificial layer over the bottom channel layer, and a top channel layer over the sacrificial layer. A dummy gate is formed across the fin structure. Portions of the fin structure not covered by the gate structure are removed to expose a top surface of the bottom dielectric isolator. First source/drain epitaxial structures are epitaxially grown over the bottom dielectric isolator and are connected to the bottom channel layer. Second source/drain epitaxial structures are epitaxially grown over the first source/drain epitaxial structures and are connected to the top channel layer. The dummy gate and the sacrificial layer are replaced with a gate structure.