Patents by Inventor Hung-Sen Chen

Hung-Sen Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of detecting whether microelectromechanical system device is hermetic
    Patent number: 9915679
    Abstract: A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: March 13, 2018
    Assignee: SensorTek technology Corp.
    Inventors: Hsin-Hung Huang, Wei-Yang Ou, Hung-Sen Chen
  • Method of Detecting Whether Microelectromechanical System Device Is Hermetic
    Publication number: 20170227575
    Abstract: A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.
    Type: Application
    Filed: April 8, 2016
    Publication date: August 10, 2017
    Inventors: Hsin-Hung Huang, Wei-Yang Ou, Hung-Sen Chen