Patents by Inventor Hung Xuan Hoang

Hung Xuan Hoang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ethercat liquid flow controller communication for substrate processing systems
    Patent number: 11693435
    Abstract: In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: July 4, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Ricardo Martinez, Hung Xuan Hoang, Dmitry Sklyar, Farooq Aleem, Jagan Rangarajan, William Wadsworth, Brett Hoogensen
  • ETHERCAT LIQUID FLOW CONTROLLER COMMUNICATION FOR SUBSTRATE PROCESSING SYSTEMS
    Publication number: 20210405665
    Abstract: In a substrate processing system, such as a chemical mechanical system, updated controller configuration data is obtained for a plurality of liquid flow controllers of the substrate processing system. Each of a plurality of liquid flow controllers (LFCs) coupled to an Ethernet for Control Automation Technology (EtherCAT) bus automatically downloads a copy of the updated controller configuration data through the EtherCAT bus. Each of the plurality of liquid flow controllers controls fluid flow of a separate fluid line from a plurality of fluid lines in the substrate processing system, fluid flow through the plurality of fluid lines is controlled using the plurality of liquid flow controllers having the updated controller configuration data.
    Type: Application
    Filed: June 23, 2021
    Publication date: December 30, 2021
    Inventors: Ricardo Martinez, Hung Xuan Hoang, Dmitry Sklyar, Farooq Aleem, Jagan Rangarajan, William Wadsworth, Brett Hoogensen