Patents by Inventor Hung-Yi Tsai
Hung-Yi Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20250079414Abstract: An electronic package module and a method for fabrication of the same are provided. The method includes providing an electronic component assembly and a circuit substrate. The electronic component assembly includes two electronic components and a conductive structure. The electronic components are connected to each other through a conductive adhesive material, while the electronic components are connected to the conductive structure through another conductive adhesive material. A soldering material is formed on the circuit substrate, and the electronic component assembly is disposed on the soldering material. The melting points of the conductive adhesive materials are higher than the melting point of the soldering material. As a result, the conductive adhesive materials are prevented from failure during the soldering process, and thus the process yield is improved.Type: ApplicationFiled: January 16, 2024Publication date: March 6, 2025Inventors: KUO-HSIEN LIAO, LI-CHENG SHEN, HUNG-YI TSAI, CHAO-HSUAN WANG, CHUN-MING CHEN, TAI-LIN WU, CHIH-SHIEN CHEN, PING-CHI HUNG
-
Publication number: 20240404834Abstract: Methods for plasma stability in a plasma treatment tool are disclosed. A laser is positioned within a plasma treatment chamber within a skin depth of the electromagnetic field generated therein. The laser can be synchronized with the electrical triggering signals that generate the electromagnetic field. This scheme provides a stable and efficient method of plasma ignition.Type: ApplicationFiled: July 29, 2024Publication date: December 5, 2024Inventors: Ping-Hsun Lin, Hung-Yi Tsai, Hao-Ping Cheng, Ta-Cheng Lien, Hsin-Chang Lee
-
Publication number: 20240337918Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes a base material made of one or more of a Cr based material, an Ir based material, a Pt based material, or Co based material, and further contains one or more additional elements selected from the group consisting of Si, B, Ge, Al, As, Sb, Te, Se and Bi.Type: ApplicationFiled: June 20, 2024Publication date: October 10, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Yi TSAI, Wei-Che HSIEH, Ta-Cheng LIEN, Hsin-Chang LEE, Ping-Hsun LIN, Hao-Ping CHENG, Ming-Wei CHEN, Szu-Ping TSAI
-
Publication number: 20240337917Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.Type: ApplicationFiled: June 17, 2024Publication date: October 10, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Pei-Cheng HSU, Ching-Huang CHEN, Hung-Yi TSAI, Ming-Wei CHEN, Hsin-Chang LEE, Ta-Cheng LIEN
-
Patent number: 12044960Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.Type: GrantFiled: June 26, 2023Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Pei-Cheng Hsu, Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Hsin-Chang Lee, Ta-Cheng Lien
-
Patent number: 12044959Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes a base material made of one or more of a Cr based material, an Ir based material, a Pt based material, or Co based material, and further contains one or more additional elements selected from the group consisting of Si, B, Ge, Al, As, Sb, Te, Se and Bi.Type: GrantFiled: February 27, 2023Date of Patent: July 23, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Ping-Hsun Lin, Hao-Ping Cheng, Ming-Wei Chen, Szu-Ping Tsai
-
Publication number: 20240045317Abstract: A method includes forming a reflective multilayer over a substrate; depositing a first capping layer over the reflective multilayer, wherein the first capping layer is made of a ruthenium-containing material or a chromium-containing material; performing a treatment to the first capping layer to introduce nitrogen or fluorine into the first capping layer; forming an absorption layer over the first capping layer; and patterning the absorption layer.Type: ApplicationFiled: August 2, 2022Publication date: February 8, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsin-Chang LEE, Ping-Hsun LIN, Pei-Cheng HSU, Hsuan-I WANG, Hung-Yi TSAI, Bo-Wei SHIH, Ta-Cheng LIEN
-
Publication number: 20240023382Abstract: An organic light-emitting diode (OLED) display may have an array of organic light-emitting diode pixels that each have OLED layers interposed between a cathode and an anode. Voltage may be applied to the anode of each pixel to control the magnitude of emitted light. The conductivity of the OLED layers may allow leakage current to pass between neighboring anodes in the display. To reduce leakage current and the accompanying cross-talk in a display, a cutting structure may disrupt continuity of the OLED layers. The cutting structure may have two undercuts to disrupt continuity of at least some of the OLED layers. The cutting structure may include a conductive portion that provides a cathode voltage to a cathode layer for the OLED pixels.Type: ApplicationFiled: September 28, 2023Publication date: January 18, 2024Inventors: Siddharth Harikrishna Mohan, Gwanwoo Park, Ping Kuen Daniel Tsang, Pei Yin, Weixin Li, Li-An Liu, Alexandru Riposan, Teruo Sasagawa, Steven J Brewer, Younggu Lee, Mitsuhiro Kashiwabara, Rui Liu, Hung-Yi Tsai, Tien-Pei Chou, Yi Wen Wang, Mahendra Chhabra, Chieh Hung Yang, Bhadrinarayana Lalgudi Visweswaran, David K. Schoenwald
-
Publication number: 20230402283Abstract: A method for fabricating a mask is provided. The method includes depositing a target layer over a dielectric substrate; forming a patterned photoresist layer over the target layer according to an integrated circuit (IC) layout; determining a plurality of dry etch control parameters according a material of the target layer and an information of the IC layout; and using a dry etcher set up with the dry etch control parameters, etching the target layer through the patterned photoresist layer.Type: ApplicationFiled: June 9, 2022Publication date: December 14, 2023Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ping-Hsun LIN, Hung-Yi TSAI, Hao-Ping CHENG, Ta-Cheng LIEN, Hsin-Chang LEE
-
Publication number: 20230352309Abstract: Methods for plasma stability in a plasma treatment tool are disclosed. A laser is positioned within a plasma treatment chamber within a skin depth of the electromagnetic field generated therein. The laser can be synchronized with the electrical triggering signals that generate the electromagnetic field. This scheme provides a stable and efficient method of plasma ignition.Type: ApplicationFiled: April 29, 2022Publication date: November 2, 2023Inventors: Ping-Hsun Lin, Hung-Yi Tsai, Hao-Ping Cheng, Ta-Cheng Lien, Hsin-Chang Lee
-
Publication number: 20230350283Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.Type: ApplicationFiled: June 26, 2023Publication date: November 2, 2023Inventors: Pei-Cheng HSU, Ching-Huang CHEN, Hung-Yi TSAI, Ming-Wei CHEN, Hsin-Chang LEE, Ta-Cheng LIEN
-
Patent number: 11726399Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.Type: GrantFiled: December 20, 2021Date of Patent: August 15, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Pei-Cheng Hsu, Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Ta-Cheng Lien, Hsin-Chang Lee
-
Publication number: 20230205072Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes a base material made of one or more of a Cr based material, an Ir based material, a Pt based material, or Co based material, and further contains one or more additional elements selected from the group consisting of Si, B, Ge, Al, As, Sb, Te, Se and Bi.Type: ApplicationFiled: February 27, 2023Publication date: June 29, 2023Inventors: Hung-Yi TSAI, Wei-Che HSIEH, Ta-Cheng LIEN, Hsin-Chang LEE, Ping-Hsun LIN, Hao-Ping CHENG, Ming-Wei CHEN, Szu-Ping TSAI
-
Patent number: 11592737Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes a base material made of one or more of a Cr based material, an Ir based material, a Pt based material, or Co based material, and further contains one or more additional elements selected from the group consisting of Si, B, Ge, Al, As, Sb, Te, Se and Bi.Type: GrantFiled: November 24, 2020Date of Patent: February 28, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Ping-Hsun Lin, Hao-Ping Cheng, Ming-Wei Chen, Szu-Ping Tsai
-
Publication number: 20220113620Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.Type: ApplicationFiled: December 20, 2021Publication date: April 14, 2022Inventors: Pei-Cheng HSU, Ching-Huang CHEN, Hung-Yi TSAI, Ming-Wei CHEN, Ta-Cheng LIEN, Hsin-Chang LEE
-
Patent number: 11204545Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.Type: GrantFiled: January 16, 2020Date of Patent: December 21, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Pei-Cheng Hsu, Ching-Huang Chen, Hung-Yi Tsai, Ming-Wei Chen, Ta-Cheng Lien, Hsin-Chang Lee
-
Publication number: 20210373430Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes a base material made of one or more of a Cr based material, an Ir based material, a Pt based material, or Co based material, and further contains one or more additional elements selected from the group consisting of Si, B, Ge, Al, As, Sb, Te, Se and Bi.Type: ApplicationFiled: November 24, 2020Publication date: December 2, 2021Inventors: Hung-Yi TSAI, Wei-Che HSIEH, Ta-Cheng LIEN, Hsin-Chang LEE, Ping-Hsun LIN, Hao-Ping CHENG, Ming-Wei CHEN, Szu-Ping TSAI
-
Publication number: 20210223679Abstract: A reflective mask includes a substrate, a reflective multilayer disposed on the substrate, a capping layer disposed on the reflective multilayer, and an absorber layer disposed on the capping layer. The absorber layer includes one or more alternating pairs of a first Cr based layer and a second Cr based layer different from the first Cr based layer.Type: ApplicationFiled: January 16, 2020Publication date: July 22, 2021Inventors: Pei-Cheng HSU, Ching-Huang CHEN, Hung-Yi TSAI, Ming-Wei CHEN, Ta-Cheng LIEN, Hsin-Chang LEE
-
Patent number: 9929056Abstract: A method for forming gate structures for a HV device and a MV device is provided. The method includes forming a HV oxide layer on the substrate, covering a first region predetermined for forming the HV device. Further in the method, a dielectric mask is formed on a central portion of the HV oxide layer. A thermal oxidation process is performed to form a MV oxide layer on the substrate at a second region predetermined for forming the MV device, wherein peripheral portions of the HV oxide layer not covered by the dielectric mask grow thicker. The dielectric mask is removed. A conductive layer is formed over the substrate. The conductive layer, the HV oxide layer, the MV oxide layer are patterned to form the gate structures.Type: GrantFiled: November 22, 2016Date of Patent: March 27, 2018Assignee: United Microelectronics Corp.Inventors: Te-Chiu Tsai, Shih-Yin Hsiao, Ching-Wei Teng, Tun-Jen Cheng, Hung-Yi Tsai, Shan-Shi Huang
-
Patent number: 9116411Abstract: A display device includes an active element array substrate, a display layer and a transparent shock absorption layer. The display layer is disposed on the active element array substrate. The transparent shock absorption layer is disposed on the display layer. The transparent shock absorption layer is formed by curing liquid adhesive material. A manufacturing method of display device is also provided.Type: GrantFiled: December 9, 2010Date of Patent: August 25, 2015Assignee: E INK HOLDINGS INC.Inventors: Yuan-Chih Tsai, Chi-Ming Wu, Ming-Sheng Chiang, Hung-Yi Tsai, Jen-Shiun Huang, Ta-Nien Luan, Wen-Chang Lu, Lee-Tyng Chen, You-Chi Tsai