Patents by Inventor Hunter Chuang

Hunter Chuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slit valve with safety detect device
    Patent number: 6291814
    Abstract: A slit valve with safety detect device to prevent clipping, used to reduce the wafer damaged by the slit valve of the seal plate, further to have the function of the safety interlock and cost down the production. This invention mainly includes a plurality of sensor to detect that whether something in the range of the seal plate moving or not. The sensor consisted of an emitter and a receiver for detecting. If there are something in the range, the moving seal plate will stop moving, avoid the wafer damaged by the seal plate and to cost down.
    Type: Grant
    Filed: June 4, 1999
    Date of Patent: September 18, 2001
    Assignee: Utek Semiconductor Corporation
    Inventors: P. C. Chuang, Tsung-Lin Lu, Gary Kuan, Hunter Chuang