Patents by Inventor Huruli D. Kishorenath

Huruli D. Kishorenath has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cryogenic vacuum pump with expander speed control
    Patent number: 5386708
    Abstract: Apparatus and method for vacuum pumping an enclosed chamber includes a cryogenic pumping device in fluid communication with the chamber for removing gases from the chamber. The cryogenic pumping device includes a cooled pumping surface and an expander for expanding a compressed gas and thereby cooling the pumping surface. The vacuum pumping apparatus further includes a sensor for sensing an operating parameter, such as temperature, of the cryogenic pumping device and a controller responsive to the sensor for controlling the operating speed of the expander to produce a desired value of the operating parameter. Typically, the sensor is a temperature sensor, and the controller controls the speed of the expander motor.
    Type: Grant
    Filed: September 2, 1993
    Date of Patent: February 7, 1995
    Assignee: Ebara Technologies Incorporated
    Inventors: Huruli D. Kishorenath, Johan E. de Rijke, Mark O. Foreman