Patents by Inventor Hussein FAWAZ

Hussein FAWAZ has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multibeamlet charged particle device and method
    Patent number: 11309163
    Abstract: A method of method of operating a multibeamlet charged particle device is disclosed. In the method, a target attached to a stage is translated, and each step of selecting beamlets, initializing beamlets, and exposing the target is repeated. The step of selecting beamlets includes passing a reconfigurable plurality of selected beamlets through the blanking circuit. The step of initializing beamlets includes pointing each of the selected beamlets in an initial direction. The step of exposing the target includes scanning each of the selected beamlets from the initial direction to a final direction, and irradiating a plurality of regions of the target on the stage with the selected beamlets.
    Type: Grant
    Filed: November 7, 2019
    Date of Patent: April 19, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Mehdi Vaez-Iravani, Christopher Dennis Bencher, Krishna Sreerambhatla, Hussein Fawaz, Lior Engel, Robert Perlmutter
  • MULTIBEAMLET CHARGED PARTICLE DEVICE AND METHOD
    Publication number: 20210142976
    Abstract: A method of method of operating a multibeamlet charged particle device is disclosed. In the method, a target attached to a stage is translated, and each step of selecting beamlets, initializing beamlets, and exposing the target is repeated. The step of selecting beamlets includes passing a reconfigurable plurality of selected beamlets through the blanking circuit. The step of initializing beamlets includes pointing each of the selected beamlets in an initial direction. The step of exposing the target includes scanning each of the selected beamlets from the initial direction to a final direction, and irradiating a plurality of regions of the target on the stage with the selected beamlets.
    Type: Application
    Filed: November 7, 2019
    Publication date: May 13, 2021
    Inventors: Mehdi VAEZ-IRAVANI, Christopher Dennis BENCHER, Krishna SREERAMBHATLA, Hussein FAWAZ, Lior ENGEL, Robert PERLMUTTER