Abstract: A raised floor system constructed of octagonal panels for use in a semiconductor clean room facility is disclosed. In the raised floor system, a plurality of pedestals each having a top portion and a base portion threadingly engaged together for adjusting a height of the pedestal is first provided. The top portion of the pedestal has a square top surface and four recessed peripheral slots surrounding the top surface. Each of the four recessed peripheral slots being adapted for engaging an octagonal panel. The raised floor system further includes a plurality of octagonal panels each has a flat top surface and a convex bottom surface equipped with a raised peripheral ridge for engaging one of the recessed slots on the top portion of the pedestal such that the flat top surface of the octagonal panel is coplanar with the square top surface of the pedestal when the octagonal panel is mounted to the pedestal.

Abstract: A method and apparatus to gage the spacing between a plurality of handling elements used for transferring planar objects into and out of holding receptacles in a semiconductor process. The handling tweezers are moved to a checking location and fit interleaved with the gage apparatus. If the handling tweezers do not fit, the tweezers are moved to an accessible maintenance location for alignment and recalibration enabling its use for transferring semiconductor wafers to and from wafer holding receptacles in a chemical vapor deposition vertical diffusion furnace.