Patents by Inventor Hwan Kyu Yoo

Hwan Kyu Yoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing apparatus
    Patent number: 8758513
    Abstract: A processing apparatus includes a loading chamber; a buffer chamber connected to the loading chamber; a first process chamber connected to the buffer chamber; and an unloading chamber connected to the first process chamber, wherein a processing path through the processing apparatus is a forward in-line path in a direction through the loading chamber, the buffer chamber, the first process chamber, and the unloading chamber.
    Type: Grant
    Filed: December 15, 2006
    Date of Patent: June 24, 2014
    Assignees: LG Display Co., Ltd., Avaco Co., Ltd., LG Electronics Inc.
    Inventors: Jin Seok Lee, Hyuk Sang Yoon, Hwan Kyu Yoo, Byeong Eok Hwang
  • Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same
    Patent number: 8741116
    Abstract: A sputtering apparatus includes a susceptor for receiving a substrate, and a first target device disposed to be opposite to a center region of a substrate and at least second and third target devices disposed to be opposite to peripheral regions of the substrate, wherein the second and third target devices are rotatable.
    Type: Grant
    Filed: September 21, 2011
    Date of Patent: June 3, 2014
    Assignees: LG Display Co., Ltd., AVACO Co., Ltd., LG Electronics Inc.
    Inventors: Tae Hyun Lim, Hwan Kyu Yoo, Byung Han Yun
  • Sputtering apparatus and driving method thereof
    Patent number: 8470142
    Abstract: A sputtering apparatus for depositing a target material on a substrate includes a chamber, a target in the chamber to provide the target material, a carrier to carry the substrate in the chamber to face the target, and a plurality of masks arranged along sides of the carrier and being movable back and forth with respect to the carrier.
    Type: Grant
    Filed: June 13, 2006
    Date of Patent: June 25, 2013
    Assignees: LG Display Co., Ltd., AVACO Co., Ltd., LG Electronics, Inc.
    Inventors: Sung Eun Kim, Tae Hyun Lim, Hwan Kyu Yoo, Kwang Jong Yoo, Yang Sik Moon, Byeong Cheol An
  • Support platform of non-contact transfer apparatus
    Patent number: 8142111
    Abstract: Provided is a support platform of a non-contact transfer apparatus. The support platform is arranged horizontally and includes first and second members adding a lift force to a first force for lifting peripheral portions of a transferred object, wherein the first force is lower than a second force lifting a central portion of the transferred object.
    Type: Grant
    Filed: March 22, 2011
    Date of Patent: March 27, 2012
    Assignees: LG Display Co., Ltd., Avaco Co., Ltd., LG Electronics, Inc.
    Inventors: Sung Eun Kim, Hyun Joo Jeon, Hwan Kyu Yoo, Ji Young Oh, Tae Kyun Kwon
  • Support platform of non-contact transfer apparatus
    Patent number: 8113761
    Abstract: There is provided a support platform of a non-contact transfer apparatus. The support platform of a non-contact transfer apparatus includes a plurality of first holes each having a plurality of sub-holes arranged in a radial direction and a plurality of second holes arranged in a line proximate the first holes.
    Type: Grant
    Filed: June 19, 2006
    Date of Patent: February 14, 2012
    Assignees: LG Display Co., Ltd., AVACO Co., Ltd., LG Electronics Inc.
    Inventors: Sang Eon Ahn, Hyun Joo Jeon, Hwan Kyu Yoo, Ji Young Oh, Cheon Soo Lee
  • SPUTTERING APPARATUS, METHOD OF OPERATING THE SAME, AND METHOD OF MANUFACTURING SUBSTRATE USING THE SAME
    Publication number: 20120006266
    Abstract: A sputtering apparatus includes a susceptor for receiving a substrate, and a first target device disposed to be opposite to a center region of a substrate and at least second and third target devices disposed to be opposite to peripheral regions of the substrate, wherein the second and third target devices are rotatable.
    Type: Application
    Filed: September 21, 2011
    Publication date: January 12, 2012
    Inventors: Tae Hyun LIM, Hwan Kyu YOO, Byung Han YUN
  • Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same
    Patent number: 8052850
    Abstract: A sputtering apparatus includes a susceptor for receiving a substrate, and a first target device disposed to be opposite to a center region of a substrate and at least second and third target devices disposed to be opposite to peripheral regions of the substrate, wherein the second and third target devices are rotatable.
    Type: Grant
    Filed: May 21, 2007
    Date of Patent: November 8, 2011
    Assignees: LG Display Co., Ltd., AVACO Co., Ltd., LG Electroncs Inc.
    Inventors: Tae Hyun Lim, Hwan Kyu Yoo, Byung Han Yun
  • Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same
    Patent number: 7981263
    Abstract: A sputtering apparatus includes a susceptor having a substrate and a plurality of target devices facing the substrate and substantially parallel to each other, each target device being rotatable.
    Type: Grant
    Filed: May 7, 2007
    Date of Patent: July 19, 2011
    Assignee: LG Display Co., Ltd.
    Inventors: Hyuk Sang Yoon, Hwan Kyu Yoo, Byung Han Yun
  • SUPPORT PLATFORM OF NON-CONTACT TRANSFER APPARATUS
    Publication number: 20110164930
    Abstract: Provided is a support platform of a non-contact transfer apparatus. The support platform is arranged horizontally and includes first and second members adding a lift force to a first force for lifting peripheral portions of a transferred object, wherein the first force is lower than a second force lifting a central portion of the transferred object.
    Type: Application
    Filed: March 22, 2011
    Publication date: July 7, 2011
    Inventors: Sung Eun KIM, Hyun Joo Jeon, Hwan Kyu Yoo, Ji Young Oh, Tae Kyun Kwon
  • Support platform of non-contact transfer apparatus
    Patent number: 7927045
    Abstract: Provided is a support platform of a non-contact transfer apparatus. The support platform is arranged horizontally and includes first and second members adding a lift force to a first force for lifting peripheral portions of a transferred object, wherein the first force is lower than a second force lifting a central portion of the transferred object.
    Type: Grant
    Filed: June 20, 2006
    Date of Patent: April 19, 2011
    Assignee: LG Display Co., Ltd.
    Inventors: Sung Eun Kim, Hyun Joo Jeon, Hwan Kyu Yoo, Ji Young Oh, Tae Kyun Kwon
  • Sputtering apparatus
    Patent number: 7708866
    Abstract: A sputtering apparatus comprises a substrate unit that includes a substrate on which a target material is deposited in a chamber and a target unit on which a plurality of target sections formed of the target material are arranged. The sputtering apparatus further comprises a cathode plate that supplies electric power to surfaces of the plurality of target sections and a plurality of gas supply ports provided on regions between the plurality of target sections.
    Type: Grant
    Filed: June 21, 2006
    Date of Patent: May 4, 2010
    Assignee: LG. Display Co., Ltd.
    Inventors: Sung Eun Kim, Cheon Soo Lee, Hwan Kyu Yoo, Byung Han Yun
  • Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same
    Publication number: 20070256933
    Abstract: A sputtering apparatus includes a susceptor having a substrate and a plurality of target devices facing the substrate and substantially parallel to each other, each target device being rotatable.
    Type: Application
    Filed: May 7, 2007
    Publication date: November 8, 2007
    Applicant: LG.Philips LCD Co., Ltd.
    Inventors: Hyuk Sang Yoon, Hwan Kyu Yoo, Byung Han Yun