Patents by Inventor Hwee-Leong Tan

Hwee-Leong Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CLEAN METHOD FOR VAPOR DEPOSITION PROCESS
    Publication number: 20080260946
    Abstract: A method for cleaning a reaction chamber having a pedestal and a carrier ring is provided. First, the pedestal and the carrier ring are cleaned with a high pressure gas. Next, the carrier ring is moved to leave the pedestal, and a low pressure gas is provided to clean the pedestal, the carrier ring, and an area lay between the pedestal and the carrier ring. Thereafter, a full flush is performed to clean the pedestal and the carrier ring.
    Type: Application
    Filed: April 20, 2007
    Publication date: October 23, 2008
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Hwee-Leong Tan, Cheng-Chung Lim, Jui-Lin Tang, Zhao-Jin Sun, Han-Chuan Fang