Patents by Inventor HYANGROK LEE

HYANGROK LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR LASER ANNEALING AND OPERATING METHOD THEREOF
    Publication number: 20230047722
    Abstract: A method of operating an apparatus for laser annealing, includes reducing temporal or spatial coherency of a plurality of laser beams by beam superimposing; and reducing an electric field inner product magnitude of beams having the reduced temporal or spatial coherency by a fly eye lens array to reduce coherency, and/or by modifying a polarization state between the beams by beam superimposing.
    Type: Application
    Filed: January 21, 2022
    Publication date: February 16, 2023
    Applicant: EO Technics Co., Ltd.
    Inventors: SANGMIN LEE, SEULGI LEE, SUNGWOOK JUNG, HYUKJUN KWON, HYANGROK LEE