Patents by Inventor Hye Joon KHEEL

Hye Joon KHEEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
    Publication number: 20230207275
    Abstract: The present invention provides a substrate treating method, including: a first treatment operation of treating the substrate by using first plasma generated by exciting first gas; and a second treatment operation of treating the substrate by using second plasma generated by exciting second gas different from the first gas.
    Type: Application
    Filed: June 30, 2022
    Publication date: June 29, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Yoon Jong JU, Seong Gil LEE, Jae Hwan KIM, Wan Jae PARK, Hye Joon KHEEL, Ji Hoon PARK, Young Je UM
  • METHOD AND APPARATUS FOR TREATING SUBSTRATE
    Publication number: 20230073489
    Abstract: Provided is a substrate treating method of removing a thin film formed on a substrate. The substrate treating method includes a reaction process of transferring an etchant to the thin film, and a removal process of removing process by-products generated by reacting the thin film with the etchant, in which the reaction process and the removal process are repeated at least twice or more, and any one of the removal processes is to remove partially the process by-products.
    Type: Application
    Filed: September 2, 2022
    Publication date: March 9, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Dong-Hun KIM, Jae Hwan KIM, Hye Joon KHEEL, Gun Woo KIM, Tae Hyeon JEON